The invention relates to a planeness measurement
system and method based on a Shack-Hartmann
wavefront sensor, relates to the technical field of optical measurement, and solves the technical problems of high cost, environmental sensitivity and low vibration robustness in a planeness measurement method in the prior art. The measuring
system comprises a
light source module, a variable
light attenuation module, a beam expanding module, a
test element loading module and an imaging detection module which are sequentially arranged in the light path direction. According to the flatness measurement
system based on the Shack-Hartmann
wavefront sensor, the Shack-Hartmann
wavefront sensor is adopted to replace a
laser interferometer to carry out
surface type detection on the surface of an optical element, height information of the surface is deduced through obtained phase data, and therefore flatness measurement is obtained. The flatness measurement method based on the Shack-Hartmann
wavefront sensor has the advantages of high precision, large wavefront
dynamic range, rapid real-time detection and the like, and has a wide application prospect.