Splicing detection device based on minor caliber circular Shack-Hartmann wavefront sensor

Abstract

The invention discloses a splicing detection device of a circular Hartmann-Shack wave-front sensor based on a minor caliber. The device is characterized by comprising the Hartmann-Shack wave-front sensor, an x-z 2D electric control translation stage, a step motor controller, a computer, a mirror surface to be detected and a data acquisition card; the Hartmann-Shack wave-front sensor is positioned behind the mirror surface to be detected to detect the mirror surface to be detected, and a facula lattice is formed on the Hartmann-Shack wave-front sensor, and the data acquisition card acquires the facula data and transmits the data to the computer for storing; the computer sends an instruction to the step motor controller, and controls the 2D electric control translation stage to move along an x axis and a z axis to scan and detect the mirror surface to be detected; the data acquisition card sequentially acquires the facula data of a wavelet surface of each frame, and then a wave surface to be detected is obtained by a centroid algorithm, a splicing method and a restoration algorithm. The device and the method help improve a formula by ignoring a defocus error in theoretical analysis, eliminate a principle error of a translation error, improve splicing precision and lower computation complexity of solving splicing parameters.

Description

technical field [0001] The invention relates to the field of optical detection, in particular to a large-diameter optical system or a splicing detection system for components. Background technique [0002] Large-aperture optical components are being increasingly used in astronomical observation, space optics, remote sensing observation, laser fusion systems and other fields, and their processing and detection technology is a difficult and hot research topic at home and abroad. When using the conventional measurement method, it is very difficult to improve the measurement accuracy under the premise of considering the cost as the caliber increases. The use of small-caliber instruments to measure large-diameter optical components can better solve the contradiction between improving measurement accuracy and reducing equipment costs, and provides a new method for the detection of optical components. [0003] At present, a detection scheme of "sub-aperture splicing interferometer...

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Problems solved by technology

At the same time, the interferometer splicing detection scheme also has harsh experimental conditions, is sensitive to atmospheric turbulence, temperature, vibration, and noise; needs to readjust the device after each movement, and has limitations such as slow detection speed

[0011] T.D.Raymond, D.R.Neal et al. used a square Hartmann-Shack wavefront sensor to measure the surface topography of Si wafers in "High-speed, non-interferometric nanotopographiccharacterization of Si wafer surfaces," (Proc. SPIE 4809, 2002.208-216). Splicing detection, but a complete general mathematical model suitable for any number of splicing frames has not been constructed, and it lacks universality for domestic and foreign markets that mainly use circular aperture Hartmann

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