Hartmann wavefront sensor based on micro-prism array for pulse light beam quality detection

A beam quality and micro-prism technology, applied in the field of micro-prism Hartmann wavefront sensors, can solve the problems of different focal length errors of micro-lens units, affecting sensor accuracy, expensive and other problems, achieving easy mass production, simplified installation and adjustment, The effect achieved by the processing technology

Inactive Publication Date: 2005-04-20
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Problems solved by technology

[0005] The technical solution problem of the present invention is: to overcome the coupling technology of microlens array and photodetector in the prior art is relatively complicated, the focal length error of the microlens unit of microlens array is inconsistency causes sensor accuracy to be affected; And sub-wedge assembly technology process is complicated However, it is expensive, not suitable for mass production, etc., and a microprism Hartmann wavefront sensor suitable for industrial mass production for pulse light beam quality detection is provided.

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  • Hartmann wavefront sensor based on micro-prism array for pulse light beam quality detection
  • Hartmann wavefront sensor based on micro-prism array for pulse light beam quality detection
  • Hartmann wavefront sensor based on micro-prism array for pulse light beam quality detection

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Embodiment Construction

[0025] Such as image 3 As shown, the laser beam emitted by the laser light source 1 is irradiated on the microprism array 41, and is imaged by the Fourier lens 42. The entire beam aperture is evenly divided and forms a spot array on the photosensitive target surface of the CCD43; the laser light source simultaneously provides a synchronous signal to Data collection device 5, data collection device 5 sends synchronous signal 51 to CCD43, makes it start the exposure of certain length of time, after exposure is finished, CCD43 outputs the data information (analog or digital) of collection to data by data cable 52 The acquisition device 5 transmits the information to the computer 6 by the data acquisition device 5, and the computer 6 processes the obtained information to obtain the corresponding parameters of the laser beam.

[0026] Such as Figure 4 As shown, the microprism Hartmann wavefront sensor is composed of a microprism array 41 with a variable period two-dimensional sa...

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Abstract

A pulse light beam quality test Hartmann wavefront sensor includes a data collection device capable of receiving and sending synchronous pulse signals, a micro-prism array, a Fourier lens and a photoelectric detector, characterizing that said sensor is composed of a micro-prism array in a variable period two-dimension saw-tooth phase grating structure, a Fourier lens close to it and the photoelectric detector, among which, the micro-prism array has a ring layout structure with a symmetrical single etching center and a double sided grating structure with double-sided etching which can either apply the micro-optical technology or binary optical technology.

Description

technical field [0001] The invention relates to a Hartmann wavefront sensor used for pulse light beam quality detection, in particular to a microprism Hartmann wavefront sensor. Background technique [0002] The beam quality of the laser determines the transmission characteristics of the laser and the convergence of the far field. The quantitative description of the beam quality is usually given by M2 factor, Strehl ratio, wavefront aberration RMS value, etc. In fact, the transmission characteristics and far-field convergence of the laser beam can already be determined from the intensity distribution and phase distribution of the laser beam. The Hartmann wavefront sensor can simultaneously detect the intensity distribution and phase distribution of the laser beam in one frame of the image of the laser beam, so it is a very effective tool for the quality inspection of the laser beam, especially the pulsed light beam. Existing Hartmann wavefront sensors used to detect the qua...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01J1/00G02B3/00G02B26/06
Inventor 王海英蒋鹏杨泽平李恩德张雨东
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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