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Wide-spectrum Shack-Hartmann wave-front sensor absolute calibration device and method

A calibration device and calibration method technology, applied in the field of optics, can solve the problem that the radius of curvature of the spherical wave to be measured is difficult to accurately measure, etc.

Active Publication Date: 2015-06-03
XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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Problems solved by technology

Due to the characteristics of the Shack-Hartmann sensor itself, it is difficult to accurately measure the true curvature radius of the spherical wave to be measured, which is obviously unreasonable

Method used

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  • Wide-spectrum Shack-Hartmann wave-front sensor absolute calibration device and method

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Embodiment Construction

[0064] The technical solution adopted in the present invention is as follows

[0065] Such as figure 1 As shown, the present invention consists of a monochromator 1, a converging mirror 2, a point diffraction plate 3, an orifice plate 4, a Shaker-Hartmann wavefront sensor 5, a high-precision translation stage 6, an acquisition and control computer 7, and optical axis positioning It consists of 8 modules. The optical axis positioning module 8 is composed of a He-Ne laser 9 , a beam splitter 10 and a plane mirror 11 . The black solid line in the figure is the fixed device, and the dotted line is the replaceable device. The conical orifice plate is fixed on the front end of the Shaker-Hartmann wavefront sensor to be calibrated; the center of the conical hole of the conical orifice plate coincides with the center of the target surface of the Shaker-Hartmann wavefront sensor to be calibrated; the Xiaker-Hartmann wavefront sensor to be calibrated The K-Hartmann wavefront sensor i...

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Abstract

The invention discloses a Shack-Hartmann wave-front sensor absolute calibration device and a Shack-Hartmann wave-front sensor absolute calibration method. The device comprises a converging mirror, a point diffraction plate, a taper hole plate, a high-precision translation table, a collection and control computer, an optical axis positioning template and a monochrometer, wherein the taper hole plate is detachably fixed at the front end of a Shack-Hartmann wave-front sensor to be calibrated; the taper hole center of the taper hole plate is overlapped with the center of a target surface of the Shack-Hartmann wave-front sensor to be calibrated; the collection and control computer is connected with the Shack-Hartmann wave-front sensor to be calibrated and the high-precision translation platform respectively; the converging mirror is arranged on an emergent light path of the monochrometer; the converging mirror, the point diffraction plate and the taper hole plate are positioned on the same optical axis in sequence; the optical axis positioning module is arranged between the point diffraction plate and the taper hole plate. The Shack-Hartmann wave-front sensor absolute calibration device disclosed by the invention has the advantages of realizing absolute calibration of a system error and a physical calibration of the Shack-Hartmann wave-front sensor and improving the system calibration precision.

Description

technical field [0001] The invention belongs to the field of optics, and relates to an absolute calibration device and method for a Shack-Hartmann wavefront sensor, in particular to a method for generating high-precision spherical waves in different wave bands by using a monochromator, a converging mirror and a point diffraction plate, and realizing wide A device and method for absolute calibration of spectral Shack-Hartmann wavefront sensor parameters. Background technique [0002] The Shack-Hartmann wavefront sensor has the following advantages: ①The structure of the measurement system and the optical path are simple; ②The time coherence of the light source is not highly required; ③It can be operated under weak light; ④The requirements for the measurement environment are not high, and Online real-time measurement; ⑤The measurement dynamic range is large, there is no uncertainty problem of 2π, and the wave surface tilt is the same, which will not affect the measurement resu...

Claims

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Application Information

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IPC IPC(8): G01J9/00
Inventor 段亚轩陈永权田留德龙江波赵建科李坤张昊苏赵怀学谢来运潘亮
Owner XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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