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Method of learning a knowledge-based database used in automatic defect classification

A learning method and automatic classification technology, which can be applied to the analysis of materials, optical testing flaws/defects, image analysis, etc., and can solve time-consuming problems

Inactive Publication Date: 2006-08-23
LEICA MICROSYSTEMS SEMICON GMBH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Knowledge-based learning is therefore extremely time-consuming

Method used

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  • Method of learning a knowledge-based database used in automatic defect classification
  • Method of learning a knowledge-based database used in automatic defect classification
  • Method of learning a knowledge-based database used in automatic defect classification

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Embodiment Construction

[0052] figure 1 A schematic structural view of a wafer inspection apparatus 1 in which the method of the present invention is implemented is shown. A scanning table 4 is integrally installed on the base 2 as a carrying table for the wafer 8 . The scanning table 4 can be moved in the X-coordinate direction and in the Y-coordinate direction. A wafer 8 to be detected is placed or hooked on the scanning table 4 . An observation device, which is preferably provided with a microscope objective 7 , is connected to the base 2 via a carrier unit 9 . The microscope objective lens 7 enables the wafer 8 to be viewed under magnification. A plurality of microscope objectives 7 may be mounted on a rotator (not shown) for dynamic viewing at different magnifications. The magnified and observed structure of the wafer 8 can be directly observed statically via an eyepiece 5 or via a display 11 , which is connected to a CCD camera 13 . In addition, an electronic unit 15 is provided, whereb...

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Abstract

The invention relates to a method of learning a knowledge-based database used in automatic defect classification. According to said method, the user is spared a series of entries as the system carries out an automatic learn mode, which requires a reduced number of user entries.

Description

technical field [0001] The invention relates to a learning method for a knowledge-based data base in automatic defect classification. Background technique [0002] In semiconductor manufacturing, wafers or reticles are sequentially processed in multiple steps during the manufacturing process. As the bulk density gradually increases, the requirements on the quality of the structures formed on the wafer also increase. In order to be able to inspect the quality of the formed structures and detect possible defects, the requirements for the quality, accuracy and reproducibility of the components and steps used to handle the wafer are also increased. This means that a reliable and early detection of defects is particularly important when wafers are produced in several steps. Therefore, the generated defects must be properly classified in order to achieve a fast processing and inspection of the wafer. [0003] In the previous automatic defect classification "Automatic Defect Cla...

Claims

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Application Information

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IPC IPC(8): G06T7/00G01N21/88G01N21/95
CPCG01N21/9501G01N2021/8854
Inventor 德克·松克森拉夫·福列德利赫安德利斯·德尔格贷特雷夫·修普西恩·凡露沃尔夫冈·朗格尔
Owner LEICA MICROSYSTEMS SEMICON GMBH
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