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Grinding equipment of plate material and grinding method

A grinding method and technology for plate-like objects, which are used in grinding/polishing equipment, metal processing equipment, grinding machines, etc., can solve problems such as low efficiency, inability to adapt to production efficiency, and difficulty in peeling off glass substrates 500

Inactive Publication Date: 2006-09-13
HENAN ANCAI HI-TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This method is very difficult to peel off the glass substrate 500, because the glass substrate used for FPD is extremely thin, the thinnest reaches 0.5MM, the possibility of the polished glass substrate 500 being damaged again is very high, and the efficiency is low
The above-mentioned loading and unloading methods for glass substrates are far from being able to adapt to large-scale production efficiency, and glass substrate manufacturing urgently needs a high-efficiency large-size glass substrate loading and unloading method and grinding equipment

Method used

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  • Grinding equipment of plate material and grinding method
  • Grinding equipment of plate material and grinding method
  • Grinding equipment of plate material and grinding method

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Embodiment Construction

[0037] The glass substrate fixture structure involved in the present invention is: the glass substrate of the present invention has been applied for independently. Figure 5 It is a typical schematic diagram of a glass substrate fixture. The upper surface of the fixture is designed with a special elastic material 410. The glass substrate 500 and the fixture 400 are firmly adsorbed together by the principle of vacuum through rolling and other methods. The lower edge of the fixture is designed with The boss 430 corresponding to the groove of the workbench can be positioned relatively accurately with the groove of the workbench through the boss 430 on the fixture. When grinding, the glass substrate 500 is adsorbed on the glass substrate holder 400, and the glass substrate holder 400 is fixed on the grinder workbench 350 by vacuum through the air holes on the workbench; Vacuum, if it is inconvenient to load and unload, you can also use the air holes of the workbench to blow air, s...

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Abstract

A method for grinding on the plate object, especially the FPD glass substrate, features that the moving trace on the surface to be ground is programmed, and a novel loading-unloading technology for the plate object is used. Its grinder features that is grinding pressure and rotation speed is adjustable and its grinding mechanism can move longitudinally and transversely.

Description

technical field [0001] The invention belongs to the technical field of fine grinding and polishing of plate-like objects, and in particular relates to a grinding equipment and a grinding method of plate-like objects for finely grinding and polishing FPD glass substrates. technical background [0002] The increasing size of the FPD display has brought more and more difficulty in the production of the glass substrate, which is the main component of the FPD. In particular, performance parameters such as surface roughness and waviness are increasingly required in the glass forming process Difficult to be satisfied. Since the glass substrate will be used in chemical deposition, physical deposition, photoetching, array and other processes to form ITO and color filters, the main components of the FPD, if the surface performance parameters cannot be guaranteed, the output of the glass substrate will be difficult to increase . [0003] In addition, in the processing of the glass su...

Claims

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Application Information

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IPC IPC(8): B24B7/02B24B7/24B24B49/08B24B49/10
Inventor 贾伟梁勇李长俊阎志勇张魁东
Owner HENAN ANCAI HI-TECH
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