Solid-state image sensor and image camera

Abstract

An object of the present invention is to provide a small solid-state image sensor which realizes significant improvement in sensitivity. The solid-state image sensor of the present invention includes a semiconductor substrate in which photoelectric conversion units are formed, a light-blocking film which is formed above the semiconductor substrate and has apertures formed so as to be positioned above respective photoelectric conversion units, and a high refractive index layer formed in the apertures. Here, each aperture has a smaller aperture width than a maximum wavelength in a wavelength oflight in a vacuum converted from a wavelength of the light entering the photoelectric conversion unit through the apertures, and the high refractive index is made of a high refractive index material having a refractive index which allows transmission of light having the maximum wavelength through the aperture.

Description

technical field [0001] The present invention relates to a solid-state imaging device used in a digital camera and the like, and particularly relates to a light receiving unit constituting the solid-state imaging device. Background technique [0002] A general solid-state imaging device has a structure in which a plurality of light-receiving units are formed on a semiconductor substrate, and each light-receiving unit has a photoelectric conversion part for photoelectrically converting light incident through an opening of a light-shielding film, and The color filter formed on the film for color separation is generally a primary color filter or a complementary color filter. The primary color filter uses red (R), blue (R), and green (G), and in the complementary color filter, the complementary color of red is cyan (C), and the complementary color of green is magenta (M). The complementary color to blue is yellow (Y). In general, signals obtained from the three colors and green...

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Problems solved by technology

Then, in order to compensate for the reduction in light concentration efficiency caused by the miniaturization of the light receiving unit, when the light concentration of the microlens 23 is optimized in the wide opening 20A, it is difficult for a part of the incident light 24 to enter the narrow opening. Therefore, the incident light 24 passing through the opening 20B is reduced, and the sensitivity of the light receiving unit B receiving high-brightness light is greatly reduced.

And, in the peripheral portion of the solid-state imaging device, the incident angle of the incident light 24 is larger than that of the central portion, so the light transmitted through the opening 20B is more difficult to converge. The sensitivity of the light-receiving unit B of the above-mentioned is greatly reduced, resulting in sensitivity shading and color unevenness, so the quality of the obtained image is significantly degraded

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