Corona discharge type ionizer

Abstract

A corona discharge type ionizer having noise reduction realized by adding a highly effective ion balance function with a simple construction without making any special change in the construction to enable the use of a piezoelectric transformer. A corona discharge type ionizer (10) having a control electrode (6) disposed at a position which is in the cylinder of a blowing tube (2) serving also as a shield body and at which ion balance is established, wherein the ionizer satisfies 2Dc < Ds, where Dc is the cylinder inner diameter of the blowing tube (2) and Ds is the ring outer diameter of the control electrode (6).

Description

technical field [0001] The present invention relates to a corona discharge ion generator with ion balance control function. Background technique [0002] In the manufacturing process of electronic devices such as semiconductors (hereinafter referred to as electronic devices), once static electricity is generated on the electronic device, the electronic device will be damaged by static electricity due to high-voltage static electricity, or floating in the air. A failure in which particles are attracted to a semiconductor circuit of an electronic device to cause a short circuit in the semiconductor circuit (hereinafter, simply referred to as an electrostatic failure). Such electrostatic faults are one of the main reasons for lowering the manufacturing yield of electronic devices. [0003] This problem can be solved if the floating objects in the clean room can be completely removed, but it is practically difficult, so it is sought to solve it by removing the static electricit...

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Problems solved by technology

[0008] However, the output voltage of the transformer is structurally not expressed on the output side even if an offset voltage is applied to the input side, so it is difficult to control the ion balance by applying the above-mentioned offset voltage.

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