Capacitive type complete decoupling horizontal axis miniature mechanical gyro

A micro-machined gyroscope, horizontal axis technology, applied in the direction of the gyro effect for speed measurement, gyroscope/steering sensing equipment, instruments, etc., can solve the problems of quadrature error, limit device performance, etc. The effect of suppressing parasitic effects
CN1948906AInactive Publication Date: 2007-04-18PEKING UNIV
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Patent Information

Authority / Receiving Office
CN Β· China
Current Assignee / Owner
PEKING UNIV
Publication Date
2007-04-18
Estimated Expiration
Not applicable Β· inactive patent

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Abstract

The invention relates to capacitance complete decoupling horizontal axis micro mechanical gyro. Its features are that it includes glass substrate, drive capacitance, drive feedback capacitance, test capacitance, drive mass block, asymmetry mass block, and test mass block. The drive mass block is set on the center of which two ends are respectively connected with the glass substrate. The mobile electrode of the drive capacitance and drive feed back capacitance are connected with the drive block. And their fixed electrodes are connected with glass substrate. The outside two ends of the asymmetry mass block are connected with the test mass block. And the inside two ends are connected with the drive mass block. The mobile electrode of the test capacitance is fixed on the test mass block. And its fixed electrode is fixed on the glass substrate. The two ends of the test mass block are fixed on the glass substrate. The invention has double-decoupling structure which can restrain ghost effect, reduce excursion, and good linearity and offset axis sensitivity.
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Description

technical field

[0001] The invention relates to a micro-mechanical gyroscope, in particular to a capacitive fully decoupled horizontal-axis micro-mechanical gyroscope using vertical comb-tooth capacitance detection. Background technique

[0002] Micromechanical gyroscopes are a type of inertial sensor that uses Coriolis force to measure the angular velocity of an object's rotation. Due to the use of micro-electromechanical system (MEMS) technology, micro-mechanical gyroscopes have the advantages of small size, light weight, and low cost. They have very broad application prospects in inertial navigation, weapon guidance, automobiles, and consumer electronics. In order to obtain the complete information of the object's rotation, it is necessary to detect the angular velocity signals of three axes at the same time, which requires a combination of multi-axis gyroscopes or three single-axis gyroscopes. Using MEMS technology to process three single-axis gyroscopes on a single chi...

Claims

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