Probe observing device, surface property detector

A technology of observation device and measurement device, which is applied in the direction of measurement device, optical device, mechanical device, etc., which can solve the problem of low measurement accuracy, inability to fully observe small probes, and the inability of probes to accurately approach the measurement point, etc. problems, to achieve good operability

Active Publication Date: 2007-04-25
MITUTOYO CORP
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  • Abstract
  • Description
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Problems solved by technology

but cannot adequately observe tiny probes
Therefore, the probe cannot be accurately approached to the measurement point, so there is a problem that the measurement accuracy is lowered.

Method used

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  • Probe observing device, surface property detector
  • Probe observing device, surface property detector
  • Probe observing device, surface property detector

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Embodiment Construction

[0041] Embodiments of the present invention are illustrated below and described with reference to reference numerals attached to elements in the drawings.

[0042] FIG. 1 is a diagram showing the overall configuration of a surface property measuring device 100 .

[0043] FIG. 2 is a diagram showing a state in which the probe 210 is photographed by the camera 230 .

[0044] The surface property measuring device 100 includes: a measuring device main body 200 having a three-dimensionally movable probe 210 and a camera (imaging mechanism) 230 for observing the probe 210; Control and image processing of image data captured by the camera 230; a monitor (display mechanism) 400 that displays measurement data and image data; and a mouse (operation mechanism) 500 that is used by the user to manually operate to input motion commands.

[0045] The measurement device main unit 200 includes a probe 210 , a three-dimensional drive mechanism 220 as a movement mechanism for three-dimensionall...

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PUM

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Abstract

The present invention relates to a probe observation device and a surface property measurement device. The probe observation device and surface characteristic measurement device include: a camera (230) for photographing the probe (210), an image processing unit (330) for image processing the image data obtained by the camera (230), (330) A monitor (400) for displaying image data subjected to image processing, and a mouse (500) for commanding input of image processing contents by manual operation. The image processing unit (330) includes an image data processing unit (350) that processes image data according to a command input from a mouse. The camera (230) has a low magnification lens system, and is set in a state where the relative position of the probe (210) is fixed when the probe (210) enters the field of view.

Description

technical field [0001] The present invention relates to a probe observation device and a surface property measurement device. For example, it relates to a probe observation device and the like for observing a probe used for measuring the surface properties of an object to be measured with a monitor or the like. Background technique [0002] Surface property measuring devices that scan the surface of the object to be measured to measure the surface properties or three-dimensional shape of the object to be measured are known, for example, known roughness measuring machines, profile shape measuring machines, roundness measuring machines, three-dimensional measuring machine etc. Such a surface property measuring device uses a probe to detect the surface of an object to be measured. In addition, in recent years, the probes have become very small because the objects to be measured have become more precise and extremely high measurement accuracy is required. Therefore, it become...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B21/00G01B21/30G01B21/20G01B11/00G01B11/30G01B11/24
CPCG01B11/007G01B5/008
Inventor 新井雅典
Owner MITUTOYO CORP
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