Fluid jetting device and method for detecting and cleaning thereof
A fluid injection and fluid technology, which is applied in the direction of spraying devices, devices for coating liquid on the surface, printing, etc., can solve the problems of increasing the design complexity of printing devices, easily damaging the surface properties of nozzle holes, increasing the volume and weight of printing devices, etc.
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no. 1 example
[0050] The first embodiment of the present invention provides a fluid ejection device with a surface acoustic wave element, including a fluid ejection element and an obliquely interdigitated surface acoustic wave element disposed on the fluid ejection element. The fluid ejection element includes: a fluid chamber in a substrate for containing fluid with a structural layer thereon; at least one fluid actuation element disposed on the structural layer and on opposite sides of the fluid chamber; and a spray hole, Adjacent to the fluid actuation element and penetrating the structural layer, and communicating with the fluid chamber. A preferred embodiment is given below, and the fluid ejection device with a surface acoustic wave element of this embodiment is described in detail in conjunction with the accompanying drawings.
[0051] FIG. 4 is a schematic diagram of a skewed interdigitated surface acoustic wave device according to a first embodiment of the present invention. Please ...
no. 2 example
[0076] The second embodiment of the present invention provides a fluid injection device and a device method for cleaning the fluid injection device. FIG. 21 shows a schematic diagram of cleaning the surface of a fluid ejection device using a surface acoustic wave device according to a second embodiment of the present invention. The cleaning fluid spraying device 120 forms an interdigital transducer 121 on the surface of a piezoelectric material 125, and the interdigital transducer 121 has a plurality of interdigital electrode strips 1213 and 1213'. The interdigitated electrode strips 1213 and 1213' are arranged at alternating intervals, wherein each interdigitated electrode strip 1213 is connected to the bus bar 1212, and the corresponding electrode strip 1213' is connected to another bus bar 1212' . The extension direction of each interdigitated electrode strip 1213, 1213' along the longitudinal axis of the electrode is at right angles to the extension direction of the long ...
no. 3 example
[0086] FIG. 27 shows a schematic diagram of a fluid ejection device 190 with the functions of detecting surface dirt by surface acoustic waves and cleaning the dirt in another embodiment of the present invention. FIG. 28 shows a schematic cross-sectional view of FIG. 27 along cutting line EE. The fluid ejection device 190 having the function of cleaning the surface of the chip with surface acoustic waves comprises a substrate 110, a structural layer 145 is formed on the substrate 110, a piezoelectric thin film layer 146 is formed on the structural layer 145, an oblique interdigitated transducer Device 191 comprises obliquely interdigitated electrodes 147 formed on the piezoelectric film layer 146. The interdigitated transducer 191 has a crossing length of W9, and the interdigitated length W9 is at a distance from the edges of the spray holes at both ends. The lengths L are equal, so that the excited surface acoustic wave can be prevented from being disturbed by the nozzle hole...
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Abstract
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