Surface measuring device

Abstract

Surface measuring device for measuring a surface of a workpiece has a device base body, and a measuring probe that by use of a feed apparatus is movable along a feed axis relative to a workpiece to be measured. The measuring probe has a probe base body and a probe element, connected to the probe base body, for scanning the workpiece in the direction of a measuring axis. The probe base body is connected to the measuring device base body via the feed apparatus. An oscillation damper is associated with the measuring probe, and is designed and configured for oscillation rate-dependent damping of oscillations of the probe base body of the measuring probe, and is active between the probe base body and the device base body.

Description

CROSS-REFERENCE TO RELATED APPLICATIONS[0001]This application claims the priority of German application no. DE 10 2016 113 398.1, filed 20 Jul. 2016, and this application claims the priority of German application no. DE 10 2016 122 695.5, filed 24 Nov. 2016, and each of which is incorporated herein by reference.FIELD OF THE INVENTION[0002]The present invention relates to a surface measuring device for measuring the surface of a workpiece.BACKGROUND OF THE INVENTION[0003]These types of surface measuring devices are generally known, and are used for measuring, for example, the contour or roughness of the surface of workpieces.[0004]The measurement of the surface of a workpiece often takes place using moving measuring probes. Tactile mechanical probes or probes that operate without contact, for example distance sensors that operate optically or pneumatically, may be used.[0005]The relatively large measuring circuit is subject to external and internal disturbances which manifest as meas...

AI Technical Summary

Benefits of technology

This solution significantly reduces measuring inaccuracies caused by oscillations, allowing for higher measuring speeds and improved accuracy, even in noisy production environments, while maintaining a low equipment cost and minimal disruption to the measurement procedure.

Problems solved by technology

The relatively large measuring circuit is subject to external and internal disturbances which manifest as measurement noise or basic interference.

To prevent further transmission of these oscillations, the base plate is frequently supported with isolation from oscillations, although the extent of the insulation when the surface measuring device is set up in the vicinity of production machines is often not sufficient.

This component of the oscillations typically dominates the overall disturbances when the measuring station or the surface measuring device is present under laboratory conditions.

In contrast, when the surface measuring device is set up near production facilities, the external disturbance component predominates.

It is unfavorable when frequency components from the oscillation excitation coincide with resonance lines of the measurement assembly in the frequency band to be transmitted.

However, these frequencies lie completely in the typically used bandwidth of the electrical measuring system.

In particular when the surface measuring device is set up near production facilities, the surface characteristic values determined in this way may be so greatly skewed that an operationally reliable assessment of the surface properties is no longer possible.

However, such an oscillation insulation system always provides only one finite damping factor for each excitation frequency.

As a result, an oscillation insulation system that performs its task under laboratory or measuring room conditions is often no longer sufficient overall for a setup near production facilities.

A further disadvantage of such oscillation insulation systems is that they require a high outlay of construction effort and equipment at the installation site of the measuring station or the surface measuring device.

Thus, for mobile surface measuring devices that may be set up at different locations, it is not meaningful to use such oscillation insulation systems.

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