Small volume chambers
a small volume, chamber technology, applied in the field of chambers, can solve the problems of inherently difficult control of the flow of gas inside a large volume chamber with equipment inside, wrong product, process requires many steps, etc., and achieve the effect of small volume and controllable interior environmen
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[0033] In its broadest aspect the present invention provides a reaction chamber wherein one portion of the chamber may be moved relative to another portion by means of a movable aerodynamic seal. Typically, the movable portion is smaller in size relative to the other portion. One of the portions may comprise, for example, a device for dispensing reagents and the other portion may comprise, for example, a holder for a support on the surface of which chemical compounds are synthesized. In the following discussion the terms “top element” and “bottom element” are employed in a relative sense not necessarily in an absolute sense.
[0034] Accordingly, in one embodiment of the present invention, a top element of the reaction chamber may comprise a portion of a device for dispensing reagents in sealing engagement therein. The bottom element of the reaction chamber is relatively small in size compared to the top element. It is preferred that the bottom portion of the chamber be only large eno...
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