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Electrically Programmable Three-Dimensional Memory Structures and Cells

a three-dimensional memory and cell technology, applied in the field of integrated circuits, can solve the problems of many heat dissipation issues, low yield of 3d-ic comprising large power consumption of logic and/or analog blocks, so as to improve the density of ep-3dm, improve the integration of ep-3dm, and reduce the cost

Inactive Publication Date: 2005-04-28
ZHANG GUOBIAO
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

"The present invention provides a three-dimensional integrated memory (3D-M) that can be easily integrated with other components on a substrate, such as processors and analog blocks. The 3D-M is formed by integrating a memory cell layer with a substrate circuit. The substrate circuit includes a plurality of gaps between certain address-select lines, which help to pass through wires and provide interface for the substrate circuit. The 3D-M is also designed with a simple cell structure and a large capacity, which minimizes the impact of the peripheral circuits on the layout of the substrate circuit. The invention also provides a method for self-aligning the 3D-ROM layer with the word and bit lines, which simplifies the manufacturing process and improves the integratibility of the 3D-M."

Problems solved by technology

Because logic and analog blocks are sensitive to defects and non-single-crystalline semiconductor material has a large defect density, the 3D-IC comprising logic and / or analog blocks have a low yield.
Moreover, logic and / or analog blocks consume large power.
The three-dimension integration of these blocks faces many heat-dissipation issues.
Moreover, it consumes little power.
However, because it is typically based on non-single-crystalline semiconductor, the performance of the 3D-M cell cannot yet compete with the conventional memory.

Method used

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  • Electrically Programmable Three-Dimensional Memory Structures and Cells
  • Electrically Programmable Three-Dimensional Memory Structures and Cells
  • Electrically Programmable Three-Dimensional Memory Structures and Cells

Examples

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Embodiment Construction

[0075] 1. Three-dimensional Integrated Memory (3DiM)

[0076]FIG. 2A is a cross-sectional view of a 3DiM. In a 3DiM, 3D-M array 0A is integrated with substrate circuit 0s. 3D-M array 0A comprises one or more three-dimensional (3-D) memory level 100. Each 3-D memory level 100 comprises a plurality of address-select lines (20a, 30i . . . ) and 3D-M cells (1ai . . . ). The address-select lines comprise metallic material and / or doped semiconductor material. Transistors 0T and their interconnects (0la, 0lb . . . ) form substrate circuit 0s. From a circuit perspective, substrate circuit 0s comprises a substrate-IC 0SC and address decoders 12, 18 / 70. These address decoders perform address decoding for the 3D-M array 0A. Contact vias (20av . . . ) provides electrical connection between the address-select lines (20a . . . ) and the substrate circuit 0s (e.g. address decoder).

[0077] In certain applications, the address-select lines in the 3D-M prefer to comprise poly-crystalline semiconductor ...

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Abstract

The present invention makes various improvements to the electrically programmable three-dimensional memory (EP-3DM), including its structure and cell design. Redundancy can be employed to improve its yield.

Description

CROSS-REFERENCE TO RELATED APPLICATIONS [0001] This application is a division of Sr. No. 10 / 615,669, Filed Jul. 8, 2003, which is a division of Sr. No. 10 / 230,648, Filed Aug. 28, 2002, now U.S. Pat. No. 6,717,222. [0002] This patent application relates to the following domestic patent applications: [0003] 1. “3D-ROM-Based IC Test Structure”, provisional application Ser. No. 60 / 328,119, filed on Oct. 7, 2001; [0004] 2. “Three-Dimensional Read-Only Memory Integrated Circuits”, provisional application Ser. No. 60 / 332,893, filed on Nov. 18, 2001; [0005] 3. “Three-Dimensional Read-Only Memory”, provisional application Ser. No. 60 / 354,313, filed on Feb. 1, 2002, and the following foreign patent applications: [0006] 1. “Three-Dimensional-Memory-Based Self-Test Integrated Circuits and Methods”, CHINA P. R., patent application Ser. No. 02113586.X, filed on Apr. 8, 2002; [0007] 2. “Three-dimensional Memory System-on-a-Chip”, CHINA P.R., patent application Ser. No. 02113738.2, filed on May 15...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): H01L27/06
CPCH01L27/0688H01L29/74H01L29/76
Inventor ZHANG, GUOBIAO
Owner ZHANG GUOBIAO