Substrate for Biochip, Biochip, Method for Manufacturing Substrate for Biochip and Method for Manufacturing Biochip
a biochip and substrate technology, applied in the field of biochip detection techniques, can solve the problems of reducing the detection accuracy of the dna chip, difficult to fix the probe dna only in the specific location, and becoming background nois
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first embodiment
[0071]With reference to FIG. 1 and FIG. 2 that is a sectional view taken on line II-II, a substrate for a biochip according to a first embodiment of the present invention includes a base plate 15 having a surface on which a plurality of hydroxyl groups (—OH) can be introduced, and a metallic membrane 13 disposed on the base plate 15, wherein a plurality of wells 41a, 41b, 41c, 41d, 41e, 41f, 41g, 41h, 41i, 42a, 42b, 42c, 42d, 42e, 42f, 42g, 42h, 42i, 43a, 43b, 43c, 43d, 43e, 43f, 43g, 43h, 43i, 44a, 44b, 44c, 44d, 44e, 44f, 44g, 44h, 44i, 45a, 45b, 45c, 45d, 45e, 45f, 45g, 45h, 45i, 46a, 46b, 46c, 46d, 46e, 46f, 46g, 46h, 46i, 47a, 47b, 47c, 47d, 47e, 47f, 47g, 47h, 47i, 48a, 48b, 48c, 48d, 48e, 48f, 48g, 48h, 48i, 49a, 49b, 49c, 49d, 49e, 49f, 49g, 49h, 49i that reach the base plate 15 are delineated in the metallic membrane 13. The film thickness of the base plate 15 is 550 micrometers, for example. Synthetic quarts (SiO2) and a silicon substrate having a surface on which a natura...
second embodiment
[0079]With reference to FIG. 7 and FIG. 8 that is a sectional view taken on line VIII-VIII, the biochip according to a second embodiment of the present invention includes the base plate 15, and the metallic membrane 13 disposed on the base plate 15, wherein the plurality of wells 41a, 41b, 41c, 41d, 41e, 41f, 41g, 41h, 41i, 42a, 42b, 42c, 42d, 42e, 42f, 42g, 42h, 42i, 43a, 43b, 43c, 43d, 43e, 43f, 43g, 43h, 43i, 44a, 44b, 44c, 44d, 44e, 44f, 44g, 44h, 44i, 45a, 45b, 45c, 45d, 45e, 45f, 45g, 45h, 45i, 46a, 46b, 46c, 46d, 46e, 46f, 46g, 46h, 46i, 47a, 47b, 47c, 47d, 47e, 47f, 47g, 47h, 47i, 48a, 48b, 48c, 48d, 48e, 48f, 48g, 48h, 48i, 49a, 49b, 49c, 49d, 49e, 49f, 49g, 49h, 49i that reach the base plate 15 are delineated in the metallic membrane 13. Each film thickness and each material of the base plate 15 and the metallic membrane 13 are similar to the substrate for the biochip shown in FIG. 1. So, an explanation is omitted.
[0080]With reference to FIG. 8, the biochip according to th...
third embodiment
[0105]With reference to FIG. 30 and FIG. 31 that is a sectional view taken on line XXXI-XXXI, a substrate for a biochip according to a third embodiment includes the base plate 15 having the surface on which the plurality of hydroxyl groups can be introduced, and a cover member 211 disposed on the base plate 15 when the probe biomolecules are bonded to the plurality of hydroxyl groups, and having a plurality of through holes 141a, 141b, 141c, 141d, 141e, 141f, 141g, 141h, 141i, 142a, 142b, 142c, 142d, 142e, 142f, 142g, 142h, 142i, 143a, 143b, 143c, 143d, 143e, 143f, 143g, 143h, 143i, 144a, 144b, 144c, 144d, 144e, 144f, 144g, 144h, 144i, 145a, 145b, 145c, 145d, 145e, 145f, 145g, 145h, 145i, 146a, 146b, 146c, 146d, 146e, 146f, 146g, 146h, 146i, 147a, 147b, 147c, 147d, 147e, 147f, 147g, 147h, 147i, 148a, 148b, 148c, 148d, 148e, 148f, 148g, 148h, 148i, 149a, 149b, 149c, 149d, 149e, 149f, 149g, 149h, 14′9i defining biding areas of the probe biomolecules on the surface of base plate 15.
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Abstract
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