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Vibration actuator unit, stage apparatus, and optical apparatus

a technology of vibration actuator and actuator, which is applied in the direction of piezoelectric/electrostrictive/magnetostrictive devices, mountings, instruments, etc., can solve the problems of further increase of scale and encoder, etc., and achieve the effect of increasing cost and space factor, and expanding scal

Active Publication Date: 2015-07-16
NIKON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

The patent describes a device that has to be very large and expensive because it has to move in two directions. Adding a small scale and an encoder to this device would make it even more expensive and take up more space.

Problems solved by technology

Addition of a scale and an encoder further increases a cost and a space factor.

Method used

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  • Vibration actuator unit, stage apparatus, and optical apparatus
  • Vibration actuator unit, stage apparatus, and optical apparatus
  • Vibration actuator unit, stage apparatus, and optical apparatus

Examples

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Embodiment Construction

[0046]Hereinafter, some embodiments of the present invention will be described. The embodiments do not limit the invention according to the claims, and all the combinations of the features described in the embodiments are not necessarily essential to means provided by aspects of the invention.

[0047]FIG. 1 is a schematic cross sectional view of a stage apparatus 101. The stage apparatus 101 comprises a base 110, biasing portions 120, a moving stage 130 and a vibration actuator unit 201.

[0048]In the stage apparatus 101, the biasing portions 120 and the vibration actuator unit 201 are provided on a flat upper surface of the base 110. The vibration actuator unit 201 is fixed to the upper surface of the base 110 with a fixing portion 112. The moving stage 130 is supported by the vibration actuator unit 201 from a downward side.

[0049]The biasing portions 120 have a strut 122, an elastic member 124, a spherical seat 126 and a rotation ball 128. The strut 122 extends from the upper surface ...

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PUM

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Abstract

A vibration actuator unit comprises: an electromechanical converting element that converts an electric vibration of an applied actuating voltage into a mechanical vibration; and a contact portion that contacts an actuated surface of an actuating subject and a transmits a mechanical vibration of the electromechanical converting element to the actuated surface as an actuating force, wherein the electromechanical converting element periodically bends within a first vibration plane crossing the actuated surface to vibrate the contact portion within the first vibration plane, and periodically bends within a second vibration plane crossing the first vibration plane to vibrate the contact portion within the second vibration plane.

Description

[0001]The contents of the following Japanese patent application(s) are incorporated herein by reference:[0002]2012-136989 filed in JP on Jun. 18, 2012;[0003]2012-161999 filed in JP on Jul. 20, 2012; and[0004]PCT / JP2013 / 003470 filed on May 31, 2013BACKGROUND[0005]1. Technical Field[0006]The present invention relates to a vibration actuator unit, a stage apparatus, and an optical apparatus.[0007]2. Related Art[0008]There is a stage apparatus which moves a stage two-dimensionally (for example, refer to Patent Literature 1). Furthermore, there is an actuating apparatus provided with a scale and an encoder for detecting a displacement signal to control an actuating signal based on the displacement signal (for example, refer to Patent Literature 2).[0009]Patent Literature 1: Japanese Patent Application Publication No. H11-316607 Patent Literature 2: Japanese Patent Application Publication No. 2011-147266SUMMARY[0010]As provided with actuators for actuating in a X direction and actuating i...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): H02N2/14G02B7/08H10N30/20
CPCG02B7/08H02N2/14H02N2/004H02N2/0095H02N2/026H02N2/028H10N30/2023G02B7/10
Inventor MATSUKAWA, EIJIKUSANO, MASAAKI
Owner NIKON CORP