Transfer system and a fixture thereof adaptable to performing levelling alignment
a technology of transfer system and levelling fixture, which is applied in the direction of basic electric elements, electrical apparatus, and semiconductor devices, can solve the problems of damage to the pick-up head of the pick-up module, and achieve the effect of effectively transferring micro devices
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first embodiment
[0022]FIG. 4A and FIG. 4B show cross-sectional views of the transfer system 100 according to the present invention. In the embodiment, a ratio of the width C1 of the cavity 131 to the width S of the pick-up head 111 is greater than 1 and is less than or equal to 1.5 (that is, 1<(C1 / S)<=1.5).
second embodiment
[0023]FIG. 5A and FIG. 5B show cross-sectional views of the transfer system 100 according to the present invention. In the embodiment, a ratio of the width C2 of the cavity 131 to the width S of the pick-up head 111 is greater than 1.5 (that is, 1.5<(C2 / S)).
third embodiment
[0024]FIG. 6A and FIG. 6B show cross-sectional views of the transfer system 100 according to the present invention. In the embodiment, the plurality of cavities 131 are interconnected to result in a single cavity to accommodate all the pick-up heads 111 of the transfer head 11.
[0025]FIG. 7 shows a cross-sectional view of a transfer system that does not adopt the levelling fixture 13 of the present invention, but uses a levelling fixture 14 having a substantially plane top surface while performing a levelling alignment stage. The levelling normal (or perpendicular) force of the transfer head 11 exerted on the levelling fixture 14 may cause damage to the pick-up heads 111 of the transfer head 11.
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