Device for writing and reading data by using cantilever
a technology of data writing and data, applied in the field of data writing and reading data by using cantilevers, can solve the problems of deteriorating the reliability of afm data storage, the deviation between the recording medium and the cantilever tip, and the failure to form uniform heights, so as to prevent the wear of the tip, reduce power consumption, and prevent the effect of sensing error
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[0030]Reference will now be made in detail to the preferred embodiments of the present invention, examples of which are illustrated in the accompanying drawings.
[0031]FIG. 3 illustrates a section of a device for writing a data by using resistively heated tip and reading a data by using a piezoelectric sensor in accordance with a first preferred embodiment of the present invention, inclusive of a silicon support having a first silicon layer 51, a silicon oxide film 52, and a second silicon layer 53, a floated cantilever part formed by etching a bottom of one side part of the second silicon layer 53, a PZT capacitor 60 having a lower electrode 61, a PZT film 62 and an upper electrode 63 on a silicon nitride film 54 on the second silicon layer 53, and a tip 57 at an edge of the second silicon layer of the cantilever part.
[0032]Referring to FIG. 4, the device for writing and reading a data in accordance with a first preferred embodiment of the present invention includes a two lines of c...
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