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Device for writing and reading data by using cantilever

a technology of data writing and data, applied in the field of data writing and reading data by using cantilevers, can solve the problems of deteriorating the reliability of afm data storage, the deviation between the recording medium and the cantilever tip, and the failure to form uniform heights, so as to prevent the wear of the tip, reduce power consumption, and prevent the effect of sensing error

Inactive Publication Date: 2006-09-12
LG ELECTRONICS INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

[0017]An object of the present invention is to provide a device for writing and reading data by using a cantilever, in which a resistively heated tip is used in writing data and a piezoelectric-sensor is used in reading data, for prevention of sensing error and reduction of a power consumption, and the piezoelectric actuator array makes the height of cantilever array be uniform, for prevention of wear of a tip.

Problems solved by technology

First, the parallel cantilever array for faster AFM data storage is liable to cause failure in forming uniform heights of the cantilever tips due to deviations of layers of SOI substrates, and etching, which in turn causes deviations between the recording medium and the cantilever tips.
80 nm, significantly greater than a depth of the data storage recess of 40 nm, that deteriorates a reliability of the AFM data storage, and causes a serious wear down problem.
Second, the array of cantilevers require to have uniform heater platforms.
If resistances of the heaters are not uniform, a reading reliability can not be secured.
350° C. for detecting change of resistance of the heater platform and reading a data consumes much power, and, in the case of the array of the cantilevers, the power consumption is much higher as hundreds of heaters are heated at the same time.
Since the nano data storage of the AFM principle is mostly for application to portable apparatuses, the high power consumption is a big disadvantage.

Method used

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  • Device for writing and reading data by using cantilever
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  • Device for writing and reading data by using cantilever

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Embodiment Construction

[0030]Reference will now be made in detail to the preferred embodiments of the present invention, examples of which are illustrated in the accompanying drawings.

[0031]FIG. 3 illustrates a section of a device for writing a data by using resistively heated tip and reading a data by using a piezoelectric sensor in accordance with a first preferred embodiment of the present invention, inclusive of a silicon support having a first silicon layer 51, a silicon oxide film 52, and a second silicon layer 53, a floated cantilever part formed by etching a bottom of one side part of the second silicon layer 53, a PZT capacitor 60 having a lower electrode 61, a PZT film 62 and an upper electrode 63 on a silicon nitride film 54 on the second silicon layer 53, and a tip 57 at an edge of the second silicon layer of the cantilever part.

[0032]Referring to FIG. 4, the device for writing and reading a data in accordance with a first preferred embodiment of the present invention includes a two lines of c...

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Abstract

Device for writing and reading a data including a floated cantilever part connected to a support, a resistively heated tip at an end of the cantilever part, and a piezoelectric sensor formed on the cantilever part, thereby preventing an occurrence of a sensing error by reading a data and reducing power consumption by using a piezoelectric sensor, and tip wear by making heights of the cantilever array uniform by using piezoelectric actuators.

Description

[0001]This application claims the benefit of the Korean Application No. P2002-14633 filed on Mar. 19, 2002, which is hereby incorporated by reference.BACKGROUND OF THE INVENTION[0002]1. Field of the Invention[0003]The present invention relates to a device for writing and reading data by using a cantilever, and more particularly, to a device for writing and reading data by using a cantilever, in which a resistively heated tip is used in writing data and a piezoelectric-sensor is used in reading data, for prevention of sensing error and reduction of a power consumption, and piezoelectric actuator array makes the height of cantilever array be uniform, for prevention of wear of a tip.[0004]2. Background of the Related Art[0005]In general, an Atomic Force Microscopy (AFM) measures a surface form and the like by using a micron cantilever. The cantilever has a tip of a few nm size at an end thereof, for measuring an atomic force between the tip and a specimen for detecting the surface form...

Claims

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Application Information

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IPC IPC(8): G11B9/00G11B9/14
CPCB82Y10/00G11B9/14G11B9/1454G11B9/1409G11B2005/0021
Inventor NAM, HYO JIN
Owner LG ELECTRONICS INC