Phase change material for a phase change memory device and method for adjusting the resistivity of the material

a technology of phase change memory and resistivity, which is applied in the direction of digital storage, conductive materials, instruments, etc., can solve the problem of small impact on achieve the effect of improving the physical properties of the phase change material, improving the performance of the phase change memory device using such a phase change material, and easy and accurate tuning

Active Publication Date: 2014-07-29
TAIWAN SEMICON MFG CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Benefits of technology

[0014]Therefore, it may be an object of the invention to adjust a resistivity of a phase change material in an easy and efficient way.

Problems solved by technology

However, only a small impact on the physical properties of the phase change material may be achieved by indium doping of the phase change material.

Method used

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  • Phase change material for a phase change memory device and method for adjusting the resistivity of the material
  • Phase change material for a phase change memory device and method for adjusting the resistivity of the material
  • Phase change material for a phase change memory device and method for adjusting the resistivity of the material

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Embodiment Construction

[0055]The illustration in the drawings is schematical. In different drawings, similar or identical elements are provided with the same reference signs.

[0056]Referring to FIG. 1, a phase change memory device 100 is shown, which comprises a switching element 102 in the form of a transistor and a phase change cell 104. The switching element 102 is connected to a first electrode 106 of the phase change cell 104 via an electric conduct. The switching element 102 is further connected to a current source 107. The first electrode 106 and a second electrode 108 are formed on a substrate 110 of the phase change cell 104. A stripe of a phase change material 112 is bridged between the first and second electrodes 106, 108. A current measurement device 114 is electrically connected to the second electrode 108 and to a reference potential 116.

[0057]The material 112 of the phase change cell 104 can be switched by the switching element 102 supplying a current of different duration and magnitude to t...

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Abstract

A phase change material for use in a phase change memory device comprises germanium-antimony-tellurium-indium, wherein the phase change material comprises in total more than 30 at % antimony, preferably 5-16 at % germanium, 30-60 at % antimony, 25-51 at % tellurium, and 2-33% at % indium.

Description

CROSS-REFERENCE TO RELATED APPLICATION[0001]This application is the 35 U.S.C. §371 national stage of PCT application “Phase Change Material for a Phase Change Memory Device and Method for Adjusting the Resistivity of the Material,” having serial number PCT / IB2010 / 051891, filed on Apr. 29, 2010 which claims priority to and benefit of European Patent Application No. 09159237.8 filed on Apr. 30, 2009, both of which are incorporated by reference in their entirety.FIELD OF THE INVENTION[0002]The invention relates to a phase change material for use in a phase change memory device.[0003]Further, the present invention relates to a method for adjusting a resistivity of a phase change material for use in a phase change memory device.[0004]Further, the invention relates to a phase change memory device.BACKGROUND OF THE INVENTION[0005]A phase change memory device is used for data storing. The phase change memory device may switch between two states, namely a set state and a reset state. In the ...

Claims

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Application Information

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Patent Type & Authority Patents(United States)
IPC IPC(8): G11C11/21H01B1/02H01L21/64
CPCH01L45/1226H01L45/06H01L45/144H10N70/823H10N70/231H10N70/8828
Inventor IN 'T ZANDT, MICHAEL ANTOINE ARMANDWOLTERS, ROBERTUS ANDRIANUS MARIAWONDERGEM, HENDRIKUS JAN
Owner TAIWAN SEMICON MFG CO LTD
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