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Dimension measuring apparatus, dimension measuring method, and program for dimension measuring apparatus

a technology of dimension measuring apparatus and dimension measuring method, which is applied in the direction of closed-circuit television system, instruments, television systems, etc., can solve the problems of difficult measurement setting, difficult measurement setting, complicated operation procedure for measuring setting, etc., and achieve high accuracy, easy positioning, and high accuracy

Active Publication Date: 2016-05-03
KEYENCE
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

Facilitates high-accuracy dimension measurement of workpieces with steps exceeding the depth of field by simplifying the measurement setting process and reducing the time required for measurement, allowing for automatic focus adjustment and edge extraction.

Problems solved by technology

There has thus been a problem in that an entire image of the workpiece is difficult to grasp and measurement setting is not easy.
There has thus been a problem in that an operating procedure for measurement setting is complicated and it takes a long time to perform measurement setting.

Method used

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  • Dimension measuring apparatus, dimension measuring method, and program for dimension measuring apparatus
  • Dimension measuring apparatus, dimension measuring method, and program for dimension measuring apparatus
  • Dimension measuring apparatus, dimension measuring method, and program for dimension measuring apparatus

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embodiment 1

Dimension Measuring Apparatus 1

[0047]FIG. 1 is a perspective view showing a constitutional example of a dimension measuring apparatus 1 according to Embodiment 1 of the present invention. This dimension measuring apparatus 1 is an image measuring apparatus that photographs a workpiece arranged on a movable stage 12 and analyzes the photographed image, to measure a dimension of the workpiece. The dimension measuring apparatus 1 is configured by a measurement unit 10, a control unit 20, a keyboard 31 and a mouse 32. The workpiece is an object to be measured whose shape and dimensions are to be measured.

[0048]The measurement unit 10 is an optical-system unit that applies illumination light to the workpiece and receives transmitted light transmitted through the workpiece or reflected light reflected by the workpiece, to generate a photographed image. The measurement unit 10 is provided with a display 11, a movable stage 12, an XY-position adjustment knob 14a, a Z-position adjustment kno...

embodiment 2

[0133]In Embodiment 1, the example of the case was described where the edge as the position to be measured is extracted from the depth extended image obtained by photographing the workpiece W to calculate a dimension value. As opposed to this, in the present embodiment, there will be described a case where the movable stage 12 is moved to a Z-directional position corresponding to the position to be measured, for focus adjustment to the position to be measured, and an edge of the position to be measured is extracted from the workpiece image subjected to focus adjustment, to calculate a dimension value.

[0134]Steps S501 to S510 of FIG. 16 are a flowchart showing an example of the operations in the dimension measuring apparatus 1 according to Embodiment 2 of the present invention at the time of measuring a workpiece. When the workpiece W as the object to be measured is arranged on the movable stage 12 and measurement execution is designated by operation of the measurement start button 1...

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Abstract

A dimension measuring apparatus is configured of: an imaging section that photographs a workpiece on the movable stage; a depth extending section that performs depth extension on a plurality of the workpiece images in different Z-directional positions in the movable stage, to generate a depth extended image; a master image displaying section that screen-displays as a master image the depth extended image obtained by photographing a master workpiece; a measured position information generating section that designates a position to be measured and a measuring method with respect to the master image, to generate measured position information; an edge extracting section that extracts an edge of the position to be measured from the depth extended image, obtained by photographing the workpiece, based on the measured position information; and a dimension value calculating section that obtains a dimension value of the position to be measured based on the extracted edge.

Description

CROSS-REFERENCE TO RELATED APPLICATIONS[0001]The present application claims foreign priority based on Japanese Patent Application No. 2011-019768, filed Feb. 1, 2011, the contents of which is incorporated herein by reference.BACKGROUND OF THE INVENTION[0002]1. Field of the Invention[0003]The present invention relates to a dimension measuring apparatus, a dimension measuring method, and a program for dimension measuring apparatus. More specifically, the present invention relates to improvement in dimension measuring apparatus which measures a dimension of a workpiece on a movable stage being movable in a Z direction based on an edge of a workpiece image obtained by photographing the workpiece.[0004]2. Description of Related Art[0005]In general, a dimension measuring apparatus is an apparatus for measuring a dimension of a workpiece based on an edge of a workpiece image obtained by photographing a workpiece, and may be called an image measuring apparatus (e.g., Unexamined Japanese Pat...

Claims

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Application Information

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Patent Type & Authority Patents(United States)
IPC IPC(8): H04N7/18G01B11/02G01B9/04
CPCG01B9/04G01B11/028
Inventor KAWA, YASUTAKA
Owner KEYENCE