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Mechanism for fixing probe card

a technology of fixing mechanism and probe card, which is applied in the field of probe units, can solve the problems of bruised electrode pads and underlayers of electrode pads, and achieve the effect of improving the reliability of the examination of electrical characteristics of wafers

Inactive Publication Date: 2011-08-30
TOKYO ELECTRON LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

This solution effectively suppresses thermal deformation and maintains reliable electrical characteristic examinations by preventing excessive vertical displacement of probe pins, reducing the risk of damage to electrode pads and ensuring accurate contact during high-temperature testing.

Problems solved by technology

As a result, the electrode pads and the underlayers thereof are bruised so as to invite a defective examination.

Method used

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  • Mechanism for fixing probe card
  • Mechanism for fixing probe card
  • Mechanism for fixing probe card

Examples

Experimental program
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Embodiment Construction

[0030]Various embodiments of the present invention in respect of the mechanism for fixing the probe card will now be described with reference to the accompanying drawings.

[0031]FIG. 3 schematically shows the configuration of a fixing mechanism 10 according to one embodiment of the present invention. As shown in FIG. 3, a disk-like probe card 11 is fixed to the fixing mechanism 10. The fixing mechanism 10 comprises a support frame 12 for supporting the probe card 11 from the upper surface and an annular holder 13 for holding the outer peripheral edge portions of the probe card 11 and the support frame 12. The fixing mechanism 10 is fixed to a head probe 14 arranged within a probe chamber having a configuration similar to the conventional configuration. As a result, the fixing mechanism 10 permits the probe card 11 to be fixed to and held by the head plate 14. The probe unit comprising the probe chamber has substantially the same structure as that of the conventional probe unit and, t...

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PUM

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Abstract

In a mechanism for fixing a probe card, the probe card and a support frame are joined to each other about the axis of each of the probe card and the support frame by a plurality of first fastening members. Also, the outer circumferential edge portion of the support frame is fixed by a plurality of second fastening members to a holder fixed to a probe unit. The probe card is held by the mechanism such that the central region of the probe card is restricted by the first fastening members and the outer circumferential portion of the probe card is not restricted so as to be rendered free. It follows that the probe card is expanded toward the outer circumferential edge portion by thermal expansion under a high-temperature. However, the probe card is prevented from being deformed in the shape of a dome.

Description

CROSS-REFERENCE TO RELATED APPLICATIONS [0001]Notice: More than one reissue application has been filed for the reissue of U.S. Pat. No. 6,831,455. The reissue applications are application Ser. No. 11 / 638,658 (the present application) and application Ser. No. 11 / 956,758, filed Dec. 14, 2007 (which is a continuation reissue application of the present application).[0002]This application is based upon and claims the benefit of priority from the prior Japanese Patent Applications No. 2002-319253, filed Nov. 1, 2002; and No. 2003-158533, filed Jun. 3, 2003, the entire contents of both of which are incorporated herein by reference.BACKGROUND OF THE INVENTION[0003]1. Field of the Invention[0004]The present invention relates to a probe unit for examining the electrical characteristics of a target object, particularly, to a fixing mechanism of a probe card for fixing a probe card arranged within a body of a probe unit, i.e., a fixing mechanism of a probe card, which permits suppressing the th...

Claims

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Application Information

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Patent Type & Authority Patents(United States)
IPC IPC(8): G01R31/02G01R1/073G01R31/28H01L21/66
CPCG01R31/2889G01R1/07342H01L22/00
Inventor YONEZAWA, TOSHIHIRO
Owner TOKYO ELECTRON LTD