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61 results about "Acid inhibitor" patented technology

Acid diffusion inhibitor with ester bonds, preparation method thereof and photoresist composition

The invention belongs to the technical field of high-molecular polymers and provides an acid diffusion inhibitor having ester bonds, (methyl)acrylate is used as a structural unit, the polymer resin formed by introducing an ester bond-containing basic group avoids the problems of poor film-forming ability, brittle rupture, peeling and the like of a photoresist film caused by mismatching of intersolubility between a macromolecular resin compound and a micromolecular acid inhibitor in the photoresist, and can control photoacid diffusion in a non-exposure area, meanwhile, the dissolvability and distribution of the resin in the photoresist can be more effectively improved, the resolution ratio and line width roughness of the photoresist are improved, and the film-forming ability of the photoresist is improved. The invention also provides a preparation method of the acid diffusion inhibitor with the ester bonds and a photoresist composition thereof. When the acid diffusion inhibitor providedby the invention is applied to a photoresist composition, the acid diffusion inhibitor has the characteristics of fixed distribution, high acid diffusion inhibition capability, property matching withacid active resin and good film-forming capability.
Owner:NINGBO NATA OPTO ELECTRONICS MATERIAL CO LTD +1
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