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75results about How to "Accuracy unchanged" patented technology

Calibration of reader/writer offset in hard disk drive using shingled recording

Embodiments of the invention provide a disk drive that is capable of determining the offset of a magnetic head position through simple and easy processing in a case where the shingle write method is adopted, and that is capable of increasing the accuracy. In one embodiment, a disk drive comprises: a recording medium including data tracks, each of which is formed with part of the data track being overwritten by an adjacent data track on the inner circumferential side or by an adjacent data track on the outer circumferential side; a head assembly including a write head for writing information to the recording medium, and a read head for reading out information from the recording medium; and a control device for controlling a position of the head assembly relative to the recording medium. Position-error detection signals whose phases differ from each other are repeatedly written to the recording medium in the track direction with written positions of the position-error detection signals being deviated from each other by a track pitch in the track width direction; and the control device controls a position of the head assembly on the basis of a burst signal read by the read head.
Owner:HITACHI GLOBAL STORAGE TECH NETHERLANDS BV

Method and device for analyzing reliability of integrated circuit

The invention relates to a method and a device for analyzing the reliability of an integrated circuit. In the analytical method, a unit circuit delayed aging stochastic analysis reference model in consideration with both negative bias temperature instability (NBTI) effect and process parameter perturbation is established, a scaling function and an equivalent aging time concept are provided to solve the delayed statistical distribution of a unit circuit under the actual work environment quickly from the reference model, and the pre-clipping process of the circuit is provided to reduce the complexity of reliable analysis. The device of the invention comprises an input unit, an output unit, a program storage unit, an external bus, a memory, a storage administration unit, an input / output bridging unit, a system bus and a processor. In the method and the device, the effect of the process parameter perturbation, the NBTI effect and the work environment of the circuit on reliability are considered simultaneously, and the complexity of the reliable analysis can be reduced effectively by utilizing the scaling function, equivalent aging time and the pre-clipping technology so as to realize the quick analysis on the reliability of super-large-scale integrated circuits in consideration with process deviation.
Owner:FUDAN UNIV

Electric operator for general-purpose mechanical automatic transmission clutch

The invention discloses an electric operator for a general-purpose mechanical automatic transmission clutch, which comprises a servo motor, a shell, a coupling, a connector, a front end flange, a back end flange, a bearing, a hinge pin, a ball screw, a pressure sensor, a spacing sensor and a displacement sensor, wherein the front end flange fixes the shell on the clutch bracket; the motor is fixed on the shell; the output shaft of the motor is connected with the screw stem of the ball screw through the coupling; the screw stem drives a screw stem shaft sleeve through balls to drive a push rod to move; and the other end of the push rod is connected with the pressure sensor, thereby finally acting on the driving lever of the clutch, so that the driving lever drives the clutch to move. The invention has the advantages of simple structure, high transmission efficiency, accurate control and the like, is suitable for clutches with different rigidities and movement strokes, and can monitor the movement state of the clutch from different angles. The invention is mainly used in electric operators for clutches in experimental study.
Owner:SHANXI WENZHENG ZHUOYUE AUTOMOBILE ELECTRONICS INJECTION DEVICE CO LTD

Signal reproduction type integrated circuit board failure detection device

The invention discloses a signal reproduction type integrated circuit board failure detection device which is composed of two portions including a hardware portion and a circuit portion. The hardware portion comprises a housing, alternating current connection wires, a power switch, a USB interface, a SD card interface, a circuit board interface to be detected, an integrated board, keys, a display screen, and a power indicator light. The circuit portion comprises a power circuit, a multi-channel signal acquisition and reproduction circuit and a master control circuit. The master control circuit comprises a single chip microcomputer, a display device, a USB interface, a storage device and the like. The multi-channel signal acquisition and reproduction circuit comprises a single chip microcomputer, an A / D conversion and D / A conversion circuit, a signal amplification circuit and the like. The device is used to acquire signals of a standard circuit board, and the acquire input signal is reproduced onto a corresponding input channel of a failure integrated circuit board, and at the same time, the input / output signal conditions of the failure integrated circuit board are acquired, so that from the input / output signal abnormal conditions, the position of a failure can be judged without knowing the internal structure of the integrated circuit board, so the maintenance speed can be greatly quickened, and the maintenance difficulty can be simplified.
Owner:蚌埠航宇知识产权服务有限公司

Ground gravity unloading support method for large spatial reflector

A ground gravity unloading support method for a large spatial reflector belongs to the technical field of space optics. In order to solve the problem that the gravity environmental variation of the large spatial reflector results in the decline of the surface shape precision of the reflector, a finite element analysis software is adopted to carry out finite element modeling on a spatial reflector assembly and analyze the variation of the reflector surface shape precision caused by gravity when the spatial reflector assembly is horizontally placed; the number and distribution of active support points at the back of the spatial reflector are primarily determined according to the size of the spatial reflector, the variation analysis result of the reflector surface shape precision and the layout condition of a support structure; after support force is applied on the active support points of the spatial reflector, the variation condition of the reflector surface shape precision caused by gravity when the spatial reflector assembly is horizontally placed is analyzed, the reflector surface shape precision result of the spatial reflector assembly is enabled to meet optical design requirements through analyzing and adjusting the size of the support force applied on the active support points and the number and distribution of the active support points, and the gravity unloading of the reflector is realized.
Owner:CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI

Device and method for measuring ice thickness

A device and method for measuring ice thickness on a first surface of a construction element. The device includes a sensor arrangement arranged in connection with the construction element and arranged to provide signals related to an impedance. A processing unit is coupled to the sensor arrangement and arranged to determine the presence of ice based on the provided impedance signals. A reference sensor arrangement is arranged to generate reference impedance measurement signals. The processing unit is further arranged to determine the ice thickness based on determinations of a relation between the impedance signals determined by the sensor arrangement and the reference impedance values generated by the reference sensor arrangement.
Owner:SAAB AB

Behavior recognition method based on continuous frame images

The invention discloses a behavior recognition method based on continuous frame images. The behavior recognition method comprises the following steps: utilizing a target detection algorithm YOLO to carry out regression on a BBOX frame of a pedestrian; cutting the regressed BBOX frame into a picture according to coordinates, adjusting the size of the picture, and storing the picture by adopting a list; and sending the pictures to a trained behavior recognition network to obtain a pedestrian recognition result. Aiming at the problem of insufficient expression ability caused by only using a target detection algorithm to detect pedestrians, the invention provides an identification method combining pedestrian detection with behavior identification. A behavior recognition network based on a 3D-RDBC module is provided, and the accuracy is basically unchanged while the parameter quantity is reduced.
Owner:UNIV OF ELECTRONICS SCI & TECH OF CHINA

Optical analog-to-digital conversion device with sampling rate capable of being reconfigured according to any power of 2

The invention relates to a high resolution reconfigurable optical analog-to-digital conversion method and device, in particular to an optical analog-to-digital conversion device with the sampling rate capable of being reconfigured according to any power of 2. The device comprises a pulse laser, a reconfigurable repetition frequency multiplication module, an electro-optic signal sampling module and a reconfigurable signal quantization and reconstruction module. According to the device, a high-stability passively mode-locked pulse laser is adopted as a system optical clock, and a heavy frequency multiplication module based on a multi-channel multiplexing technology is used, so that high speed optical clock signals can be effectively acquired. A switching device is used for changing channel numbers of the heavy frequency multiplication module and a back-end parallel photoelectric conversion and quantization module, so that multiplication of the light sampling rate is realized according to reconfigurability of power of 2, time delay and range matching are not required to be readjusted after marked, and the switching speed of the system in working states is guaranteed by quick response of the switching device. Besides, high speed optical sampling of electric signals is realized by the aid of an ultra broadband electro-optic modulator (or an electro-optic sampling gate), and finally, high speed optical analog-to-digital conversion is realized by the aid of parallel photoelectric conversion, parallel electric quantization and parallel data processing.
Owner:SHANGHAI JIAO TONG UNIV

Non-contact power information acquisition controller

The invention discloses a non-contact electric energy information acquisition controller. It solves the problems of high cost, difficult implementation, and inability to monitor and control abnormal power consumption. The acquisition and controller is composed of the part of power information collection and processing [10] and the part of power information concentration, storage, transmission and communication protocol conversion [11]: a non-contact sensor is installed at the power line entrance of the monitored target, which is controlled by electromagnetic induction. The principle detects the electric energy information, which is processed into the required electric energy parameters by the electric energy information processing module [3] and the central processing unit [4], and sent to the second part by the interface [5]; the electric energy parameters received by the second part are determined by the communication protocol The conversion module [6] and the central processing unit [7] carry out, classify, collect and store, and send the power parameters to the power information monitoring platform server [12] through the communication protocol conversion module [8] through the computer network and send control instructions to the first part , so as to realize the alarm and control the power-off of the relay module [9]. Significantly save energy and realize the monitoring of low-carbon electricity consumption.
Owner:刘长利

A wind speed sensor and detection method for cotton foreign fiber detection

The invention discloses a wind speed sensor and a detection method for detecting cotton foreign fibers. The central bearing is connected to the wind direction cup device through sliding balls. Several wind direction cups are evenly distributed in the circumferential direction outside the wind direction cup device; the middle section of the central bearing is coaxial. The gear is fixed, and the top of each saw tooth of the gear is fixedly pasted with a magnetic steel sheet; there is an inductive switch element on the front end of the Hall sensor. The inductive switch element is located near the magnetic steel sheet and the two are on the same level. The Hall sensor is internally connected The photoelectric coupler and the wind direction cup rotate with the wind to drive the central bearing and gear to rotate synchronously, and the Hall effect is generated between the magnetic steel sheet and the Hall sensor switch; then the frequency of the pulse signal is measured using the multi-cycle synchronization method through the microcontroller. The pulse signal is proportional to the signal of the wind direction cup rotational speed, achieving equal-accuracy measurement of the output signal in the entire frequency range, reducing the measurement error, and improving the measurement accuracy of the pulse signal frequency.
Owner:JIANGSU UNIV

Multi-terminal model compression method and device based on knowledge federation, task prediction method and device and electronic equipment

The invention discloses a multi-terminal model compression method and device based on knowledge federation, a task prediction method and device and electronic equipment. The multi-terminal model compression method comprises the following steps: aggregating N-th trained local models reported by a plurality of participants to obtain a global to-be-compressed model, wherein N is greater than or equalto 1; compressing the global to-be-compressed model based on a preset performance index by adopting a common data set to obtain a global compression model, wherein the preset performance index is used for representing a performance index of the global compression model during prediction, and the common data set is obtained by performing data enhancement on the data of the plurality of participants; and sending the global compression model to the plurality of participants to carry out N + 1 rounds of training.
Owner:TONGDUN HLDG CO LTD

Unmanned aerial vehicle measurement and control signal intelligent identification method under strong mutual interference condition

The invention discloses an intelligent identification method for measurement and control signals of an unmanned aerial vehicle under a strong mutual interference condition, and the method comprises the steps: carrying out the detection and receiving of a space electromagnetic wave signal through a radio electronic signal reconnaissance device, sequentially carrying out the low-noise power amplification, filtering, A / D conversion and digital down conversion of the received signal, and finally converting the received signal into zero-intermediate-frequency time domain IQ data; the method comprises the following steps of: acquiring and storing a received signal by using a signal detection and identification processor, performing time-frequency transformation on the received signal to obtain a time-frequency map of the received signal, performing absolute value obtaining and normalization preprocessing operation on the time-frequency map, and performing deep learning-based target detection on the preprocessed time-frequency map; the signal detection and recognition processor comprises a target detection model based on deep learning. According to the method, the pruning thought of the pruning deep learning model is adopted, the precision is kept basically unchanged, the model calculation complexity is reduced, the model recognition speed is increased, the consumption of calculation resources is effectively reduced, and multi-platform transplantation of the model is more convenient.
Owner:中国人民解放军32802部队

Ball guide shoes

The invention discloses a pair of ball guide shoes. The ball guide shoes have the advantages that the operating resistance of an elevator can be reduced, the energy is saved, higher moving speed can be easily obtained, long-time and smooth operation of the elevator can be maintained, the safe and reliable effects are achieved, the service life is long, the installation and the replacement are convenient and the volume is small. Each ball guide shoe comprises a guide shoe seat, wherein a fixed bracket is arranged on the guide shoe seat. The ball guide shoe is characterized in that the center of the fixed bracket is longitudinally provided with a vertical guide system corresponding to a working top surface of a guide rail; the two sides of the guide shoe seat are provided with a left-side guide system and a right-side guide system corresponding to working side surfaces of the guide rail; the vertical guide system consists of a ball frame A, a ball cover A and a ball A which are fixed by bolts; the left-side guide system consists of a ball frame B, a ball cover B and a ball B which are fixed by bolts; the right-side guide system consists of a ball frame C, a ball cover C and a ball C which are fixed by bolts; the vertical guide system, the left-side guide system and the right-side guide system form a concave-shaped sliding groove; and the fixed bracket is provided with guide-shoe outer covers for covering the left-side guide system and the right-side guide system.
Owner:锦州市特种设备监督检验所

Supportive element capable of supporting ball screws with different shaft end size

The invention discloses a supportive element capable of supporting ball screws with different shaft end size and particularly relates to the supportive element capable of supporting ball screws with different shaft end size. The supportive element mainly comprises a pressure nut, a threaded sleeve, an elastic retaining ring, a spring taper sleeve, a bearing, an inner taper sleeve, a supportive seat, an isolation sleeve and a locking nut and is characterized in that after ball screws with different size are replaced, the ball screws can be supported without detaching the supportive seat by replacing the spring taper sleeve, the bearing, the elastic retaining ring, the isolation sleeve and the locking nut. The supportive element capable of supporting ball screws with different shaft end size is compact in structure, high in centering precision, convenient to operate, low in cost and easy to machine.
Owner:NANJING UNIV OF SCI & TECH

Laser measuring device and measuring method

The invention belongs to the technical field of space volume rate or loading rate accurate measurement, and discloses a laser measuring device and a measuring method. The device and the method mainlysolve the technical problem that the measuring efficiency is low when a self-developed laser measuring device is used for measuring the volume rate of the space or the loading rate of the carriage ofa truck. The laser measuring device comprises a laser emitting mechanism, a vertical rotating mechanism, a horizontal rotating mechanism and a bracket. The vertical rotating mechanism, the horizontalrotating mechanism and the laser emitting mechanism are arranged on the bracket. The vertical rotating mechanism is connected with the laser emitting mechanism and drives the laser emitting mechanismto rotate. The horizontal rotating mechanism is connected with the bracket and drives the bracket to rotate. The measuring working efficiency of the laser measuring device can be effectively improved.Meanwhile, the laser measuring device can also be installed on the top of the measured space to carry out the up-down measurement operation. The dead zone of the measured space is reduced.
Owner:SF TECH

Providing environment data of a planned route

A method of providing environment data for a driver assistance system on board a motor vehicle comprises the following steps: determining a route (SABZ) to be traveled on, providing environment data along the determined route, additional environment data (220) along an initial portion of a new route (AC) deviating from the initial route being provided, determining that the motor vehicle actually travels on said new route, determining an alternative route which comprises the new route traveled on, and providing environment data along the alternative route.
Owner:ROBERT BOSCH GMBH

Model construction method and device, terminal device and medium

The method is suitable for the technical field of model construction, and provides a model construction method, a model construction device, a terminal device and a medium. The model construction method comprises the following steps: determining a convolution layer queue from a trained face detection model; then, based on the channel weight of each feature channel of each convolution layer in theconvolution layer queue and a preset channel deletion proportion, deleting the feature channels in the convolution layer queue; arranging the convolution layers according to the arrangement sequence of the convolution layers in the convolution layer queue; performing channel deletion on each convolution layer in sequence. According to the method, the convolution layer is not deleted in the new face detection model, and only part of channels in the convolution layer are deleted, so that the resource occupancy rate when the new face detection model is operated can be reduced under the conditionof ensuring that the face detection accuracy is not changed, and meanwhile, the face image recognition efficiency is improved.
Owner:SHENZHEN INTELLIFUSION TECHNOLOGIES CO LTD

Device and method for measuring ice thickness

A device and method for measuring ice thickness on a first surface of a construction element. The device includes a sensor arrangement arranged in connection with the construction element and arranged to provide signals related to an impedance. A processing unit is coupled to the sensor arrangement and arranged to determine the presence of ice based on the provided impedance signals. A reference sensor arrangement is arranged to generate reference impedance measurement signals. The processing unit is further arranged to determine the ice thickness based on determinations of a relation between the impedance signals determined by the sensor arrangement and the reference impedance values generated by the reference sensor arrangement.
Owner:SAAB AB

Mass traffic data knowledge mining and parallel processing method

The invention discloses a mass traffic data knowledge mining and parallel processing method. The method is characterized in that an LSTM model is stored in N computing servers of a distributed cluster, a training data set is divided into N sets which are respectively input into the N computing servers, and the computing servers are trained simultaneously, so that the training time of the LSTM model can be shortened. A parameter matrix is transmitted to a parameter server after a calculation server finishes one-time forward propagation and back propagation, and the parameter matrix is decomposed into a form of multiplying two matrixes by adopting a matrix decomposition method, so that the total quantity of parameters is reduced, and the communication time consumption is reduced. A matrix compression rate is set, the matrix is compressed by using an adaptive threshold filtering method, so that the number of parameters is reduced again, and the communication time consumption is reduced again. An error matrix before and after matrix compression is calculated and is transmitted the error matrix to the next round of training, the matrix after error elimination is calculated by using the parameter matrix and the error matrix at the beginning of the next round of training, and then training is performed, so that the error caused by matrix compression can be made up, and the precision of the LSTM model is ensured.
Owner:BEIHANG UNIV

Sensor detection circuit, drive control circuit board, electronic equipment and air conditioner

The invention provides a sensor detection circuit, a drive control circuit board, electronic equipment and an air conditioner, and the sensor detection circuit comprises a sensor, a first sampling circuit connected with the input voltage end of the sensor and used for collecting the input voltage of the sensor, a second sampling circuit connected with the output voltage end of the sensor and used for collecting the output voltage of the sensor, and a control circuit connected with the output end of the first sampling circuit and the output end of the second sampling circuit and used for outputting a detection result according to the collected output voltage of the sensor and the collected input voltage of the sensor. Compared with an existing technical scheme, the sensor detection circuit can improve the detection precision of the detection result output by the sensor; therefore, the sensor detection circuit can adapt to a use scene with a higher detection result precision requirement.
Owner:HEFEI MIDEA HEATING & VENTILATING EQUIP +1

Neural network design method for memory calculation and judging whether someone is in room or not

The invention discloses a neural network design method for memory calculation and judging whether there is a person indoors, and the method comprises the steps: an ultra-lightweight neural network model is established, i.e., a UL-CNN model; a UL-CNN model is built according to the rules that a chip based on a memory computing architecture is insensitive to high level and the memory is limited within the range of 2K * 2K; a convolution operation method and a full-connection matrix operation method are adjusted by using fixed-point processing, so that the UL-CNN model is applied to a Conv-Flashchip based on a memory computing architecture for reasoning, and finally whether someone is indoors or not is detected. Compared with other mainstream CNNs, when the problem that someone is in the room and nobody is in the room is solved, the method has the advantages that the parameter amount and the calculated amount are reduced, the calculation time is shorter, but the accuracy is basically unchanged.
Owner:XI AN JIAOTONG UNIV

Multisurface measuring method of double station cooperative type large structural part

InactiveCN101639347ARealize multi-faceted measurementSimple methodUsing optical meansTotal stationHydrology
The invention relates to a multisurface measuring method of a double station cooperative type large structural part, belonging to the technical field of photoelectric online detection. The existing single station transferring type measuring method has tedious operation, causes precision loss in the transferring process and causes the decrease of measuring precision. The multisurface measuring method adopts two total station instruments, wherein a main total station instrument is positioned at the position which can aim at a point to be measured at one side of the large structural part; an auxiliary total station instrument is positioned at the position which can aim at a point to be measured at the other side of the large structural part; the two total station instruments can aim mutuallyand determine a directed angle of the auxiliary total station instrument corresponding to the main total station instrument; the main total station instrument measures the point to be measured at oneside of the large structural part, and the auxiliary total station instrument measures the point to be measured at the other side of the large structural part; the measured data is transmitted to a shared computer; and the distance between two points to be measured is calculated by the computer according to measuring software. The multisurface measuring method is used for measuring multisurface size and errors of the large structural part.
Owner:CHANGCHUN UNIV OF SCI & TECH

Finger-fork type instrument terminals bus-bar wire

The present invention provides an interdigital instrument terminal bus bar, which comprises a stator fixed with the bus bar, a strip finger fixed on one side of the stator and fixing holes on the stator. Wherein, fixing holes are arranged at one end of the finger. The finger is higher than a right angle of a corner while the stator is fixed. With a simple and rational structure, the present invention can not only effectively improve measuring precision of electric energy meters of different COS Phi but also eliminate impact amongst users of electric energy meters.
Owner:黑龙江省电工仪器仪表工程技术研究中心有限公司

Coal gasification synthesis gas desulfurization device and method

Embodiments of the present invention provide a coal gasification-to-synthesis gas desulfurization device and method, which relate to the technical field of gas desulfurization. A method for desulfurization from coal gasification to syngas, comprising: reacting coal gasification to syngas with a desulfurizer to remove sulfides in the syngas to obtain desulfurized syngas and a deactivated desulfurizer, wherein the desulfurizer is modified with phosphorus or boron. Desulfurizing agent, its effective components include zinc oxide and hydrogenation active components; the deactivated desulfurization agent is reacted with oxygen to generate zinc oxide, and the hydrogenation active components are oxidized to obtain an oxidative desulfurization agent; the oxidative desulfurization agent is contacted with desulfurized synthesis gas The hydrogen in the desulfurized synthesis gas is reduced by the oxidized hydrogenation active components to obtain a desulfurizing agent that restores the activity. The coal gasification to syngas desulfurization device includes: a fluidized bed desulfurization reactor, a fluidized bed reduction reactor and a fluidized bed oxidation reactor. The above-mentioned device and method can ensure sufficient desulfurization, and the desulfurization agent can be recycled and used in the desulfurization process, and the desulfurization precision and sulfur capacity can be basically unchanged.
Owner:CHINA PETROLEUM & CHEM CORP +1

Parallel Network Traffic Anomaly Detection Method Based on Spark and Isolation Forest

The invention discloses a parallel network traffic anomaly detection method based on Spark and isolation forest. On the basis of the isolation forest algorithm, with the help of parallel processing technology Spark, computing resources are provided for the tree building process and abnormal evaluation process, and the iForest algorithm modeling process is realized. The parallelization and batch processing of anomaly evaluation can effectively improve the accuracy of anomaly detection and reduce the time complexity. At the same time, it also provides a new idea and theoretical method basis for network traffic anomaly detection.
Owner:GUILIN UNIV OF ELECTRONIC TECH

Method for measuring surface morphology to detect internal defects of interlayer of double-layer or multi-layer film

The invention discloses a method for measuring surface morphology to detect internal defects of the interlayer of a double-layer or multi-layer film, belonging to the technical fields of microelectronics and microelectronic machinery manufacturing. To overcome the problems of destructive processing, long operation time, high cost and the like in preparation and detection of thin-film devices, microelectronic devices, microelectronic machines and other devices, the invention provides the method for measuring surface morphology to detect internal defects of the interlayer of a double-layer or multi-layer film. The method identifies the positions and sizes of the defects according to morphological changes of the surface of the film before and after ageing, heat cycle or mechanical cycle caused by the internal defects. The method has the characteristics of rapidness, no destruction, instantaneity and low detection cost. When the method is applied to information electronic manufacturing fields like microelectronics and microelectronic machinery, manufacturing cost and testing cost are greatly reduced and quality is improved, so the method has good application prospects in the above fields and in the field of manufacturing of structures of a same kind.
Owner:HARBIN INST OF TECH

Double-disc type lubricating oil traction force testing machine

ActiveCN102818752ARealize the loadDrag force measurement is preciseSurface/boundary effectCouplingEngineering
The invention relates to a double-disc type lubricating oil traction force testing machine, which comprises a motor I, a motor II, a coupling I, a coupling II, a lower disc shaft, an upper disc shaft, a lower disc, an upper disc, a hydraulic loading mechanism and a force testing mechanism. With the testing machine of the present invention, real working conditions of the lubricating oil under an elastohydrodynamic lubrication state can be simulated, a rolling movement between the corresponding transmission contact members is accompanied with a sliding movement, continuous loading can be achieved, and the lubricating oil traction force under an elastohydrodynamic lubrication state can be accurately measured.
Owner:QILU UNIV OF TECH

Photoresist reworking etching process

The invention relates to the technical field of integrated circuits, and in particular relates to a photoresist reworking etching process. According to the photoresist reworking etching process disclosed by the invention, in an etching process manufacturing procedure, a photoresist needing to be reworked and a non-nitrogen bottom anti-reflecting layer are sequentially removed, a new non-nitrogen bottom anti-reflecting layer is re-deposited, and the photoresist is continuously coated for performing a subsequent photoetching process so as to complete a photoresist reworking process. Therefore, during the photoetching process, preparation of a protection layer on the non-nitrogen bottom anti-reflecting layer for preventing optical parameters or surface properties of the non-nitrogen bottom anti-reflecting layer from being influenced during subsequent photoetching reworking is eliminated, so that the flow of the whole photoetching process is simplified; meanwhile, by the adoption of the photoresist reworking etching process, the accuracy of a product subjected to photoresist reworking in a subsequent photoetching process remains unchanged, and the performance and yield of the product are further improved.
Owner:SHANGHAI HUALI MICROELECTRONICS CORP
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