Method for uniform glow discharge in atmosphere air
A technology of glow discharge and atmospheric pressure, used in corona discharge devices, circuits, electrical components, etc., can solve the problems of low efficiency, high cost, and inability to change high-power high-frequency power supplies, and achieve the effect of eliminating the phenomenon of filaments
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[0008] The specific embodiment of the present invention is that the external plasma source 1, plasma nozzle 2, and high-frequency capacitive dielectric barrier discharge device 3 for preparing plasma are arranged as shown in Figure 1, and the plasma nozzle 2 is parallel to the high-frequency capacitive dielectric The distance between the gas gap of the barrier discharge device 3 and the dielectric barrier layer of the dielectric barrier discharge device 3 is 1 cm, and the plasma injection direction points to the center of the gas gap. The metal electrode 11 of the external plasma source 1 is connected to the AC power source 12 of 20 kHz, and the voltage of the AC power source 12 is gradually increased to cause arc discharge on the metal electrode 11 to generate plasma. The gas flow pressure is 4 atmospheres and the gas flow rate is 3 The gas flow of cubic meters per minute sprays the plasma into the gas gap of the high-frequency capacitive dielectric barrier discharge device 3 ...
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