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Ultrasonic positioning and ranging microacoustic system based on silicon microprocessing technology

An ultrasonic positioning and acoustic system technology, applied in positioning, radio wave measurement systems, measurement devices, etc., can solve the problems of little progress in the application of ferroelectric thin films, delays, difficulties in application integration processes, etc., to promote miniaturization and integration. , improve reliability, high reliability and anti-interference effect

Inactive Publication Date: 2008-03-19
TSINGHUA UNIV
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  • Summary
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  • Claims
  • Application Information

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Problems solved by technology

The research on its thin film has a history of more than 40 years. However, due to the limitation of film-making technology, the film that meets the device quality requirements has not been prepared. Therefore, in the first two decades, the application research of ferroelectric thin film has not progressed. Large, the same application in MEMS has been greatly delayed due to the difficulty of its integration process

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  • Ultrasonic positioning and ranging microacoustic system based on silicon microprocessing technology
  • Ultrasonic positioning and ranging microacoustic system based on silicon microprocessing technology
  • Ultrasonic positioning and ranging microacoustic system based on silicon microprocessing technology

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Embodiment Construction

[0013] The invention is a micro-acoustic system for ultrasonic positioning and ranging. The working principle of the silicon-based ferroelectric thin film micro-acoustic device in the present invention is: based on the piezoelectric effect, the ferroelectric thin film vibrates due to receiving ultrasonic waves, and the vibration is converted into an electrical signal output, thereby realizing the function of a micro-microphone; On the contrary, due to the inverse piezoelectric effect, the ferroelectric film vibrates due to the change of the input electrical signal, and emits ultrasonic waves, thereby realizing the function of a micro-speaker. Therefore, the structure of the micro-acoustic device involved in the present invention can be used not only as a microphone but also as a loudspeaker.

[0014] The principle of the present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0015] The structure of the device is show...

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Abstract

An ultrasonic positioning and microsound distance measuring system is featured as using ferroelectric microloudspeaker as ultrasonic emitting source and ferroelectric micromike as ultrasonic receiver, directing their faces to tested object, connecting output signal lines of the two to signal processor connected with computer. The micro sound component is prepared by multiplayer film material made of ferroelectric film.

Description

technical field [0001] The invention belongs to the technical field of positioning and ranging, in particular to an ultrasonic positioning and ranging microacoustic system based on silicon micromachining technology. Background technique [0002] Micro Electro Mechanical System (MEMS—Micro Electro Mechanical System) is a multi-disciplinary emerging discipline developed on the basis of microelectronic technology, which integrates micro-mechanics, micro-sensors, micro-actuators, signal processing, and intelligent control. Combining the conventional integrated circuit technology with the unique special technology of micromachining, the scope involves various engineering technologies and disciplines such as microelectronics, mechanics, mechanics, automatic control, and material science. The main content of MEMS research includes micro-sensors, micro-actuators and various micro-systems, and now it has become a hot spot that countries around the world have invested a lot of money i...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01S5/30G01S5/18
Inventor 任天令朱一平杨轶刘理天蔡坚王水弟王海宁贾松良
Owner TSINGHUA UNIV