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Quartz transmission polarized beam splitting grating for 441.6 nano wave band

A technology of polarization beam splitting and grating, applied in the direction of diffraction grating, etc.

Inactive Publication Date: 2008-07-02
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

But as far as we know, no one has given the design parameters of deeply etched high-density quartz transmission polarization beam-splitting gratings for the commonly used He-Cd laser at a wavelength of 441.6 nm

Method used

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  • Quartz transmission polarized beam splitting grating for 441.6 nano wave band
  • Quartz transmission polarized beam splitting grating for 441.6 nano wave band
  • Quartz transmission polarized beam splitting grating for 441.6 nano wave band

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Embodiment Construction

[0019] Using micro-optics technology to manufacture high-density rectangular polarization beam splitting grating, first deposit a metal chromium film on a dry and clean fused silica substrate, and coat a layer of positive photoresist evenly on the chromium film (Shipley, S1818, USA ). Then use the holographic recording method to record the grating (see Figure 6 ), a He-Cd laser 7 is used as the recording light source. When recording the holographic grating, the shutter 8 is opened, and the narrow beam emitted from the laser is split into two narrow beams through the beam splitter 9. After passing through the reflector 10, one beam passes through the beam expander 14 and the lens 16 to form a wide plane wave; after passing through the reflector 11, the other beam passes through the beam expander 15 and the lens 17 to form a wide plane wave. After the two plane waves pass through the mirrors 12 and 13 respectively, an interference field is formed on the substrate 18 at an angle of 2...

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Abstract

This invention relates to a quartz transmission polarized beam-splitter grating used in 441.6 nm wave band characterizing that when the period of said grating is 328-341 nm and ectched depth is 1.290-1.340 mum, the extinction ratio of the polarized beam-splitter grating is greater than 100, the 0-stage transmission diffraction efficiency of TE polarized light is greater than 94.18% and that of the first stage of TM is higher than 96.01%, which realizes that the two polarized modes are vertical to each other and in different directions. This invented grating is processed by an optical holographic recording technology or an electronic beam writing device combined with micro-electronic deep etching technology.

Description

Technical field [0001] This patent relates to a polarization beam splitting grating, especially a quartz transmission polarization beam splitting grating for the 441.6 nanometer band. The polarization beam splitting grating is a polarization beam splitting grating with a high extinction ratio and high diffraction efficiency of He-Cd laser with a wavelength of 441.6 nanometers. Background technique [0002] In many optical information processing systems, a polarization beam splitter is a key element, which can split light into two polarized lights whose polarization modes are perpendicular to each other. In most applications, people often need high extinction ratio, high transmittance or reflectivity, wider operable wavelength range and angular bandwidth, and small volume polarization beam splitter. The traditional polarization beam splitter is based on the natural birefringence effect of some crystals (such as Thomson prism, Nicol prism and Wollaston prism) or the polarization se...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B5/18
Inventor 周常河王博
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI