Structure of package using coupling and its forming method
A packaging structure and bump technology, applied in the direction of electrical components, electrical solid devices, circuits, etc., can solve problems such as chip cracking, uneven joint surface, open circuit, etc.
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[0022] A preferred embodiment of the package structure and its forming method of the present invention is described in detail as follows.
[0023] 2A to 2D are schematic cross-sectional views of the forming process of the packaging structure of the present invention. First, please refer to FIG. 2A , a pad 220 and a protective layer 240 are sequentially formed on a substrate 200 , and the protective layer 240 is formed around the pad 220 to protect components on the substrate 200 . Wherein, the material forming the pad 220 is metal, preferably an aluminum pad. Next, a mask layer 260 is formed on the protective layer 240 by using a lithography process, and the contact pad 220 is exposed to define the formation position of the first bump 270, and then an electroplating process is performed to form the first bump 270 in the defined position. A first bump 270 with a height of about 2-3 μm. The first bump 270 will completely cover the pad 220 for protecting the pad 220 as well as ...
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