Semiconductor manufacture equipment control system and method
A control system and semiconductor technology, applied in the field of communication, can solve problems such as uncontrollable process reaction modules, status information cannot be deeply understood, and affect production efficiency, so as to simplify the overall control link, avoid information islands, and reduce efficiency wasteful effect
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[0020] The following describes the communication method of the etching equipment subsystem of the present invention and the specific implementation of the device in further detail in conjunction with the accompanying drawings, but it is not used to limit the scope of protection of the present invention.
[0021] A semiconductor process equipment control system, with the equipment module controller (EMC) and the engineering equipment module controller (EMC) as the unified controller of the factory, responsible for centralized management of material in and out and scheduling transmission between different reaction modules of the equipment, It also executes the process processing tasks from the factory manufacturing execution system; at the same time, it directly controls the transmission of materials according to the preset optimization algorithm and parameter values such as time and sequence logic; provides a consistent interface to the factory material management and manufactu...
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