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Method for measuring minute angle based on self-commix interference of laser and apparatus thereof

A self-mixing interference and micro-angle technology, applied in the field of laser measurement, can solve the problems of complex devices and low measurement accuracy of the self-collimation method, and achieve the effect of simple structure and high measurement accuracy

Inactive Publication Date: 2008-11-19
JINAN UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The purpose of the present invention is to provide a micro-angle measurement method based on laser self-mixing interference, which can effectively solve the problems of low measurement accuracy of the self-collimation method and complex devices of the traditional laser interferometry

Method used

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  • Method for measuring minute angle based on self-commix interference of laser and apparatus thereof
  • Method for measuring minute angle based on self-commix interference of laser and apparatus thereof
  • Method for measuring minute angle based on self-commix interference of laser and apparatus thereof

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Embodiment 1

[0029] like image 3 , the laser 1 adopts a helium-neon laser with a cavity length of 250 mm and an output power of 3 milliwatts; a transparent wedge reflector 3 is fixed on the rotary table 4, and the use of the wedge as the reflector can avoid the two surfaces of the plane reflector The reflected light is fed back into the laser cavity at the same time, so that only one surface of the reflected light can be fed back into the laser cavity. The reflectivity of the transparent wedge mirror is about 4%, forming a weak feedback mode; the laser beam deviates from the 4-angle rotation center of the measured object The distance d=0.75mm, the distance h=1.5cm between the wedge reflector 3 and the angular rotation center. A silicon photocell 5 is used to detect the light beam energy passing through the optical wedge. The silicon photocell 5 converts the optical signal into an electrical signal and then amplifies it through the signal conditioning circuit 6. After that, it is collected...

Embodiment 2

[0032] Figure 5 Among them, the difference from Embodiment 1 is that the laser 1 adopts a semiconductor laser with an output power of 5 milliwatts, the laser beam deviates from the distance h=3mm from the center of rotation of the measured object 4 angles, and the reflective surface of the optical wedge reflector 3 is located The plane rotates through the center of the angle.

[0033] Image 6 is the curve of measured optical power changing with angle. In the figure, the dotted line is the curve fitting line, through which the maximum amplitude of the interference fringes can be found, and the corresponding angle here is taken as the zero reference angle for angle measurement. Through the pre-calibrated angle value corresponding to each fringe cycle change and fringe subdivision technology, using Image 6 It can realize the measurement of the small rotation angle of the measured object.

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Abstract

This invention relates to one micro angle measurement method and device based on laser self mixture and intervene, which comprises the following steps: sending the laser beam output by laser into reflection lens of object surface and the incidence line goes off object angle rotation center and the laser output power uses one photoelectricity detector and when the object changes by micro angle, the detector detects laser output power; the angle change leads feedback light process each length and the output laser power changes one ripe circuit and through pre-set angle and output power relationship to realize object rotation angle.

Description

technical field [0001] The invention relates to the technical field of laser measurement, in particular to a micro-angle measurement method and device based on laser self-mixing interference. Background technique [0002] Angle measurement is an important part of metrology. The measurement of tiny angles is of great significance and role in many fields such as aerospace, military, micro-electromechanical systems, precision machining, and high-precision testing. At present, the commonly used micro-angle measurement methods mainly include: optical self-collimation method, laser interferometry and so on. Each device has its own characteristics and application limitations. The autocollimation method is to optically make the object and the image respectively on the conjugate plane. When the object rotates, the image point formed by the object on the image plane also moves accordingly. By measuring the movement of the image point, the Find the angle of rotation of the object. T...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/26G01D5/26
Inventor 钟金钢琚志祥
Owner JINAN UNIVERSITY