Micro-mechanical reciprocating membrane pump

Abstract

The present invention relates to micro mechanical reciprocating membrane pump, and is one kind of micro mechanical reciprocating membrane pump for biochemical microanalysis. The micro mechanical reciprocating membrane pump has piezoelectric driving device as driving source, which makes the membrane vibrate to force the pump cavity to suck in and pump out fluid reciprocally; inertial fairing flow channel as no-motion valve to make the flow damp in some direction greater than that in the other direction; inertial ring cavity to further increase the damp difference between two directions. The present invention has simple structure, can drive fluid containing relatively large grain, has no damage to cell or macro molecule in fluid, no dead volume and constant flow rate and other advantages, and is suitable for driving micro volume fluid in micro flow channel of cross section size in decades and hundreds microns.

Description

technical field [0001] The invention relates to a micromechanical reciprocating diaphragm pump, in particular to a micromechanical reciprocating diaphragm pump for microanalysis of biochemistry. Background technique [0002] Micromechanical reciprocating diaphragm pumps are widely used in microanalysis of biochemistry, which play the role of pumping samples, reagents, and buffers in the steps of sample introduction, analysis, and cleaning. The working principle of the general micromechanical reciprocating diaphragm pump is: connect the directional valve at both ends of the pump chamber, cover the diaphragm above the pump chamber, and the diaphragm reciprocates, forcing the pump chamber to suck fluid from one end and discharge fluid from the other end. Micromechanical reciprocating diaphragm pumps can be divided into two categories according to the use of one-way valves with moving parts and directional valves without moving parts. [0003] The advantage of using a micromech...

AI Technical Summary

Problems solved by technology

[0007] The micropump invented by Fred K. Foster et al. only considers the use of inertial rectification in the valve without moving parts, and does not perform inertial rectification on the entire flow process in the pump; for the application of biochemical analysis, it can obtain The pump pressure is still not high enough, and the output pulsation is still large

The pump cavity it adopts is the same as that of the existing micromechanical reciprocating diaphragm pump, which is a single-communication domain cavity, which occupies a large amount of fluid, the stagnation time of the fluid in it is uncertain, and the cleaning process is long.

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