Substrate bonding apparatus for liquid crystal display device and method for driving the same
A substrate and equipment technology, applied in the field of substrate bonding equipment, can solve problems such as damaging the substrate, generating static electricity, and damaging the substrate circuit
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[0035] Preferred embodiments of the invention will now be described in detail, examples of which are illustrated in the accompanying drawings.
[0036] Fig. 3 is a cross-sectional view of a typical substrate bonding apparatus according to the present invention. In FIG. 3, a substrate bonding apparatus for a liquid crystal display device may include a bonding chamber 110, an upper table 121 and a lower table 122, a table moving unit, a vacuum unit 200, a loading part 300, and a substrate lifting system 400 and a clamping system.
[0037]The bonding chamber 110 may include a structure suitable for performing a bonding process between substrates. The bonding chamber 110 may comprise a single chamber structure having an access door (not shown). On the other hand, the bonding chamber 110 may also include upper and lower parts (not shown in the figure), which facilitate loading / unloading of respective substrates. The upper and lower parts can move in both vertical and horizontal ...
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