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Position correctable bearing tray

A technology for carrying disks and carrying areas, which is applied in the fields of electrical components, semiconductor/solid-state device manufacturing, circuits, etc., and can solve problems such as chip edge area damage and particle pollution

Inactive Publication Date: 2009-10-21
GRACE SEMICON MFG CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] However, since the tray is as big as the chip, when the robot arm releases the chip on the tray, the movable clamp will press the chip to the fixed components around the tray, so that the edges of the chip are close to the fixed components and cause a gap between each other. Contact friction relationship, and then produce many particle issues, causing damage to the edge area of ​​​​the chip

Method used

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  • Position correctable bearing tray
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  • Position correctable bearing tray

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Embodiment Construction

[0017] Please also refer to figure 1 and figure 2 , which are respectively a structural schematic diagram of the correctable carrier plate and a schematic structural diagram of a side surface. As shown in the figure, the carrier plate 10 of the present invention that can correct the position includes a chip carrier area 12 for carrying such as image 3 The chip 14 shown, wherein the area of ​​the chip carrying area 12 is the same as that of the chip 14, and there are six disconnected calibration areas 16 extending 1 to 2 millimeters from the edge of the chip loading area 12, so that between every two calibration areas 16 A notch with a depth h of 1 to 2 mm is formed, so there are six notches 181, 182, 183, 184, 185, 186 for the robotic arm (not shown in the figure) to grab the chip 14, and there is a V-shaped positioning notch 20 is set on the edge of one of the correction areas 16, as the position mark of the chip 14, and a plurality of fixed components 22, and several mov...

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PUM

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Abstract

The invention provides a bearing plate which can correct position, comprising a chip bearing area used for bearing a chip and a plurality of correcting areas extending from the edge of the chip bearing area; the correcting areas are disconnected so as to form a plurality of notches; when permeating the correcting areas and leading the chip to be placed on the bearing plate from a mechanical arm, the bearing plate has sliding space so as to avoid particle pollution caused by friction between fixed components around the bearing plate and the chip.

Description

technical field [0001] The invention relates to a position-correctable carrying tray, in particular to a carrying tray for carrying chips. Background technique [0002] In the semiconductor process, it is often necessary to use a robot arm to grab the chip from a holding room for placing the chip, and then transfer the chip to the processing room, and place the chip on the carrier plate of a rotating system for processing. , and the robotic arm takes the chip out of the processing chamber. Wherein, the size of the carrier plate is the same as that of the chip, and there are multiple fixed components (finger restraint) and several movable clamps on the opposite side of the fixed component around the carrier plate to fix the chip, that is, when the robot arm When placing chips on the tray, the movable clamps will be opened first, and after the chips are placed on the tray, the movable fixtures will be closed to fix the chips, and then the tray will start to rotate to prepare ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/687H01L21/68
Inventor 徐继六
Owner GRACE SEMICON MFG CORP