Double-raster displacement sensor

A technology of displacement sensor and double grating, which is applied in the direction of converting sensor output, using optical devices to transmit sensing components, instruments, etc., which can solve the problems of difficulty in improving resolution, inconvenient adjustment, and bulky single grating interferometer

Inactive Publication Date: 2007-07-18
HUAZHONG UNIV OF SCI & TECH
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Problems solved by technology

Due to the requirement of two mirrors and a beam splitting prism to realize the convergence and interference of diffracted light, the single grating interferometer

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Embodiment Construction

[0009] The invention forms interference fringe features corresponding to the period of the grating through grating diffraction interference, and realizes high-precision and large-range displacement measurement through receiving and analyzing interference fringe signals. The present invention will be described in further detail below in conjunction with the accompanying drawings.

[0010] As shown in Figure 1, when the laser beam is incident on two gratings placed in parallel, it first diffracts through the previous grating to produce +1, 0 and -1 order diffracted lights, which are then diffracted by the latter grating to generate (+ 1, +1), (+1, 0), (+1, -1), (0, +1), (0, 0), (0, -1) and (-1, +1), ( -1,0), (-1,-1). Properly adjust the positional relationship between the gratings, then (+1, 0) and (0, +1), (+1, -1) and (-1, +1) and (-1, 0) and (0, - 1), both can interfere separately to obtain interference fringes. Choose the -1 order diffracted light of +1 order diffracted l...

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Abstract

The invention relates to double-grating displacement transducer. It includes displacement unit, displacement guiding unit, signal processing circuit, laser, double grating unit, and photo-electricity receiver. The double gratings unit is formed by movable and fixed ones. The displacement unit and displacement guiding unit form the rectilinear kinematic pair; laser emits laser beam into double grating unit to produce double grating interference; photo-electricity receiver is used to receive the interference fringe, transmit the electric signal into signal processing circuit. Compared with the single grating displacement transducer, the invention has better interference fringe and fringe voltage signal, suits for using higher subdivision to reach higher resolution. Only if the movable grating has good consistency in moving, it can realize good sized displacement range with 20mm, and 0.01um resolving ability.

Description

technical field [0001] The invention belongs to the technical field of measuring devices and relates to a displacement sensor based on double grating interference. Background technique [0002] There are many methods for measuring displacement at present, such as using Moiré fringe displacement sensors, centimeters, micrometers, micrometers, and single grating interferometers on the market. But they have some problems. [0003] The general principle of the single grating interferometer is as follows: the laser beam is vertically incident on the diffraction grating, and after one diffraction, two diffracted beams of +1 order and -1 order are formed; two reflectors and a beam splitting prism are used to converge the two beams of diffracted light to generate Interference forms interference fringes; when the grating moves, it causes the corresponding movement of the fringes; by counting and subdividing the interference fringes, the grating displacement can be obtained. Due to ...

Claims

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Application Information

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IPC IPC(8): G01D5/26G01D5/347G01D5/38G01B11/02G01B9/02
Inventor 刘晓军陈晓辉
Owner HUAZHONG UNIV OF SCI & TECH
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