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Drying device

A drying device and substrate technology, which is applied in drying, drying solid materials, heating to dry solid materials, etc., can solve the problems of increasing manufacturing time, increasing device costs, and device costs cannot be ignored

Inactive Publication Date: 2007-12-05
SEMES CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Therefore, such repeated drying process will increase the manufacturing time
Moreover, when the heating stage and the cooling stage are carried out in different chambers, considering the time consumed for recovering the substrate from the heating chamber and moving it to the cooling chamber, and when making a display requires dozens of drying processes, the process time is reduced. will increase a lot
Moreover, the device cost required for constructing the above-mentioned mobile device cannot be ignored.
The inspection and maintenance of the heating chamber and cooling chamber must be carried out in the mobile device, the working area is narrow, and there is a danger of safety accidents
[0005] Also, in some devices, a conveyor is used to move the substrate from the cooling chamber to the buffer, which increases the cost of the device

Method used

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Embodiment Construction

[0018] The present invention will now be described more fully with reference to the accompanying drawings, in which preferred embodiments of the invention are shown. The advantages and features of the present invention and how to achieve them can be more easily understood by referring to the following detailed description of the preferred embodiments and the accompanying drawings. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete and will fully convey the concept of the invention to those skilled in the art, and the present invention will only be defined by the appended claims. Like numerals refer to like elements throughout the specification.

[0019] In the present invention, the term that an element or layer is "on" or "over" another element or layer means not only being directly above the ot...

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Abstract

The present invention provides a drying device which improves the technique efficiency. The drying device includes a substrate heating part, a substrate cooling part and a first substrate conveying machine which feeds the substrate from the substrate heating part or substrate cooling part and recycles it, wherein the substrate heating part, the first substrate conveying machine and the substrate cooling part are arranged with L shape.

Description

technical field [0001] The present invention relates to a drying device, in particular, to a drying device for improving process efficiency. Background technique [0002] Recently, information processors have been rapidly developed to have various forms of functions and faster information processing speeds. In order to display start-up information, such information processors must have a display device. At present, display devices attracting attention include flat panel display devices such as liquid crystal display devices, organic EL display devices, and plasma display devices. [0003] The substrates of these flat panel display devices include multi-layer films and printed circuit patterns. When the above thin film and circuit pattern are mainly formed using a photolithography process. In the photolithography process, a photo resist pattern is mainly used as an etching mask. The photoresist pattern is applied in a liquid state, and after it is hardened by a drying pro...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F26B3/00F26B25/00
CPCH01L21/67098H10K71/233H10K71/00
Inventor 金相吉
Owner SEMES CO LTD