Film forming device, film forming method, and method of producing organic el element

Abstract

A film forming device has a source for feeding a film forming material and a substrate on which a film of the film forming material is formed. The film forming device is constructed from a mask (36) provided on the front side of the substrate so as to be movable in a direction approaching and leaving the front surface of the substrate; a magnet (22) provided on the rear side of the substrate so as to be movable in a direction approaching and leaving the rear side of the substrate; and a movement limitation means (24) for limiting the movement of the magnet (22) within a predetermined range.

Description

technical field [0001] The invention relates to a film forming device, a film forming method and a manufacturing method of an organic electroluminescent (EL) element. Background technique [0002] A film forming apparatus for forming a predetermined pattern on a substrate includes: a chuck for holding the substrate in a planar shape, a mask formed of a magnetic material forming a predetermined opening pattern, and a device for fixing the mask on the substrate. magnet. Furthermore, at the time of film formation, the substrate is mounted and held on the surface of the chuck, and the mask is covered on the substrate. The mask is held on the substrate by the magnetic force of a magnet placed on the back of the chuck. [0003] Next, in Patent Document 1 disclosed regarding a thin film forming apparatus, it is described that by keeping the permanent magnet away from the substrate when the mask is fixed on the substrate, and bringing the permanent magnet close to the substrate af...

AI Technical Summary

Problems solved by technology

When the opening pattern is deformed, there is a problem that the correct film formation pattern cannot be obtained on the substrate

[0006] In addition, when the mask is separated from the substrate, even if the magnet moves away from the substrate to weaken the influence of the magnetic force acting on the mask, if the magnet is moved without restriction, there is a problem that it takes time for this movement.

In particular, in the manufacture of organic EL (Electroluminescence: electroluminescence) elements, shortening of the manufacturing time is required in order to increase the throughput, and therefore, there is a problem that the resulting manufacturing time is spent when the magnet is moved indefinitely.

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