Infrared gas analyzer
A gas analyzer and infrared technology, which is applied in the fields of analyzing materials, instruments, and material analysis by optical means, can solve the problems of damage to the measurement accuracy of infrared gas analyzers.
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no. 1 example
[0139] FIG. 1 is a diagram showing the configuration of a first embodiment of an infrared gas analyzer of the present invention. Similar parts are denoted by the same reference numerals in FIG. 1 and FIGS. 33 to 35 . Reference numerals 1503 and 1504 are gas flow channels through which the detection gas flows in a right angle direction. Arranged in the gas flow channel 1503 is a thermal flow sensor 151 for detecting the flow of the detection gas corresponding to the concentration of the measured component (signal component: arrow U sig ). In another gas flow channel 1504 is arranged a thermal flow sensor 153 comprising heating wires 1531 and 1532 . The heating lines 1531 and 1532 of the thermal flow sensor 153 are arranged in the same direction as the heating lines 1511 and 1512 of the thermal flow sensor 151 .
[0140] In this case, the flow (signal component) of the detection gas corresponding to the concentration of the detection component flows in the flow paths 1503 and...
no. 2 example
[0149] Fig. 3 is a diagram showing the configuration of a second embodiment of the infrared gas analyzer of the present invention; similar parts are denoted by the same reference numerals in Figs. 1 and 3 . In the embodiment shown in FIG. 3, a bridge circuit is provided in the compensation section 113, wherein the output signal V of the vibration noise component is eliminated 0 13 directly from the bridge road.
[0150] FIG. 4 is a circuit diagram showing a specific example of the configuration of the compensation section 113 . As shown in Figure 4, the heating wires 1511, 1512, 1531 and 1532 of the thermal flow sensors 151 and 152 are inserted on different sides of the bridge, and are obtained from the output of the bridge between the outputs of the two thermal flow sensors 151 and 153. The difference corresponds to the output signal V 0 13.
[0151] That is, the heating lines 1531 and 1532 of the thermal flow sensor 153 are inserted into different sides of the bridge in a...
no. 3 example
[0156] FIG. 6 is a diagram showing the configuration of a third embodiment of the infrared gas analyzer of the present invention, and like parts are denoted by the same reference numerals in FIG. 1 to FIG. 5 and FIG. 6 . In the embodiment shown in FIG. 6, thermal flow sensors 151 and 153 are composed of four heating wires 1511, 1512, 1513, 1514 and 1531, 1532, 1533, 1534, respectively.
[0157] In the thermal flow sensors 151 and 153, the heating wire portions arranged on the upstream side and the downstream side of the air flow respectively include two heating wires. These heating lines are arranged parallel to the flow direction of the detection gas.
[0158] FIG. 7 is a circuit diagram showing a specific example of the configuration of the compensation section (bridge) 113 . As shown in FIG. 7 , heating wires 1511 , 1512 , 1513 , 1514 , 1531 , 1532 , 1533 , 1534 of thermal flow sensors 151 and 153 are respectively inserted into respective sides of the bridge in the directi...
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