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Shadow mask and deposition device having the same

A shadow mask and deposition technology, applied in lighting devices, ion implantation plating, coating, etc., can solve the problems of easy contamination of substrates and chambers

Active Publication Date: 2008-01-02
LG DISPLAY CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, the substrate and the interior of the chamber are easily contaminated

Method used

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  • Shadow mask and deposition device having the same
  • Shadow mask and deposition device having the same
  • Shadow mask and deposition device having the same

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Embodiment Construction

[0025] While a shadow mask according to an embodiment and a deposition apparatus having the same will be described with reference to the accompanying drawings, it should be understood that those skilled in the art can devise numerous other modifications that will fall within the spirit and scope of the principles of this disclosure. and implementation. In the drawings, the sizes of chambers, deposition units, substrate holding units, shadow masks and other structures are exaggerated or reduced for the accuracy of the present invention. In the present invention, when it is described that a layer is formed on "on", "on the upper surface" or "on the lower surface", it means that the layer is directly or indirectly formed on the chamber, deposition unit, substrate fixing unit, shade The upper or lower surface of the mask and other structures, and other chambers, deposition units, substrate holding units, shadow masks and structures may be additionally formed on the substrate.

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PUM

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Abstract

Disclosed are a shadow mask and a deposition device having the same. The deposition device includes a shadow mask that has a plurality of openings, a chamber that has the shadow mask therein, a deposition cell disposed on a lower portion of the chamber, in which the deposition cell contains deposition materials, and a blocking member interposed between an inner side of the chamber and an outer side of the shadow mask so as to prevent the deposition materials from passing through between the inner side of the chamber and the outer side of the shadow mask. Deposition materials sublimated from a deposition cell are prevented from passing through the shadow mask, except for the openings of the shadow mask, so that the inside of a chamber can be prevented from being contaminated, thereby improving workability of a thin film deposition device. Deposition materials attached to the inside of the chamber can be prevented from being separated from the chamber, so the deposition materials cannot serve as particles.

Description

technical field [0001] The present invention relates to a shadow mask and a deposition apparatus having the shadow mask. Background technique [0002] Recently, an information processor capable of processing large-capacity storage data in a short time and a display device capable of displaying data processed by the information processor as an image have been developed. [0003] Display devices typically include liquid crystal displays (LCDs), organic light emitting diodes (OLEDs), plasma display panels (PDPs), and the like. [0004] Among the above devices, OLEDs can operate at low voltage and can be made thinner. [0005] In addition, OLED has a wide viewing angle and fast response speed. [0006] In addition, OLEDs can display images with display quality similar to those provided by LCDs or PDPs, and can also be manufactured through simple processes. [0007] Generally, an OLED includes: a transparent electrode disposed on a transparent substrate, an organic light-emitt...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/04C23C14/12C23C14/24
CPCC23C14/042H05B33/10
Inventor 金廷炫李在允李相根
Owner LG DISPLAY CO LTD