Method for supplying medicine liquid

Abstract

An efficient drug fluid supply method which can reduce the amount of coating liquid discharging to a discharging gas cylinder. At t1 time, to turn on a switch valve (11) and make the motor of a pump rotate positively, so as to enlarge the cubage of the storage space. Supplying the coating fluid through a degassing module (8) to the memory space of a ration pump by a coating fluid supply tube (10). Then at t2 time when the coating fluid memory space arrives prescribed cubage, to intermit the motor of the pump, at the same time to turn off the switch valve (11), after two seconds behind the t2 time, to make the motor of the pump positively so as to enlarge the cubage of the coating fluid memory space to fill coating fluid. Here due to the switch valves (14, 17) are closed, the coating fluidmemory space is a closed space, the pressure of the coating fluid memory space decreases along with the cubage of the memory space increasing. After this, at t5 time, to open the switch valve (17) and discharge the residual pressure of the coating fluid memory space, so as to recover the coating fluid to a tank (19).

Description

technical field [0001] The present invention relates to a method of supplying a chemical liquid such as a coating liquid for forming a film or the like to the surface of a substrate to be processed such as a glass substrate. Background technique [0002] When using a slit nozzle or the like to form a film of uniform thickness on the surface of the substrate to be processed, it is necessary to supply a certain amount of coating liquid to the surface of the substrate to be processed within a certain period of time. As such techniques, Patent Document 1, 2. [0003] In Patent Document 1, a coating device using a syringe pump is disclosed, and a method is proposed to first measure the flow rate or weight of the coated coating agent, and then use the measured value for the next coating. A technology in the correction of the application conditions of the liquid. [0004] After the first spraying (coating) is completed by driving the syringe pump (quantitative pump), and between ...

AI Technical Summary

Problems solved by technology

[0009] It can be seen from this that, although the coating method using the slit nozzle can greatly reduce the amount of the coating liquid (chemical solution) used compared with the conventional centrifugal method, if the coating liquid lost together with the residual pressure is considered If it is liquid, it cannot be said to be effectively used. This is an urgent issue that needs to be improved.

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