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100% matching circular, annular equal light beam aperture microarray grating

A ring-shaped beam and micro-array technology, applied in the field of micro-array grating, achieves the effect of realizing processing technology, easy processing technology, and reducing the complexity of design and manufacturing process

Inactive Publication Date: 2010-06-30
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] Another technical solution of the present invention is to provide several practical design and production schemes that can effectively reduce the complexity of microarray chip design and process production, especially the combination of two one-dimensional zigzag phase grating arrays. The solution solves the problem of how to improve the production efficiency of the sawtooth phase grating and realize the mass production

Method used

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  • 100% matching circular, annular equal light beam aperture microarray grating
  • 100% matching circular, annular equal light beam aperture microarray grating
  • 100% matching circular, annular equal light beam aperture microarray grating

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Experimental program
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Embodiment approach

[0039] A. On one surface of the same substrate or optical component, fabricate each designed two-dimensional zigzag phase grating to form an array. For example, for a circular beam aperture, each fan-shaped sub-aperture is an independent two-dimensional phase grating. Zigzag phase grating, the two-dimensional zigzag array gratings in each fan-shaped sub-aperture are different, forming a centrally symmetrical circular layout, see attached image 3 shown;

[0040] B. Only the one-dimensional array grating in the X direction can be made on one surface of the same substrate or the same optical component, and the one-dimensional array grating in the Y direction can only be made on the other surface, and a two-dimensional phase grating array can be realized on both sides function, see attached Figure 4 shown;

[0041] C. On one surface of a substrate or optical component, only one-dimensional array grating in X direction is fabricated, and on one surface of another substrate or o...

Embodiment approach B and specific Embodiment approach C

[0042] The specific embodiment A of the present invention is relatively intuitive and easy to understand. The specific embodiment B and the specific embodiment C of the present invention are further described below according to the accompanying drawings: after the same sub-aperture division and design as the specific embodiment A, the two-dimensional zigzag phase grating in each sub-aperture is divided according to X and Y The two directions are decomposed into two one-dimensional array gratings, that is, each sub-aperture is composed of one-dimensional array gratings in two directions, see Image 6 shown. Still taking the circular or annular beam aperture as an example, after dividing the entire beam aperture into equal-area sectors, and designing the spatial periods in the X direction and Y direction for each sector sub-aperture, the following work is carried out: first extract each The spatial period of the fan-shaped sub-aperture in the X direction is used as the period o...

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Abstract

The utility model relates to a fabrication method of micro array grating which is fully matched with circular and annular beam aperture, which is characterized in that the number N of sub-aperture separated on the entire beam aperture is determined according to the principle of equal area of various sub-apertures; the expected spot array distribution is set, the spot array has N spots in total, the N expected spot arrays are corresponding to the N sub-apertures; the both directions space cycle or sawteeth depth of the two-dimensional array grating in each sub-aperture is designed according tocorresponding relation, zigzag phase grating with the structure is fabricated in each sub-aperture, the spot arrays of a square structured arrangement is formed by converging with the combined lens or lens group. The utility model has the advantages that the circular, annular aperture, even arbitrary shape beam aperture in theory can be fully matched, and the spot array still has a square structured arrangement, thereby solving the problem that the technology of the zigzag phase grating array can not be applied in practice, improving the efficiency of the zigzag phase grating production, and facilitating mass production.

Description

technical field [0001] The invention relates to a micro-array grating, in particular to a micro-array grating capable of 100% matching circular, circular, or even arbitrary-shaped beam apertures, and the formed light spot arrays are regularly arranged in a square shape. Background technique [0002] The Hartmann wavefront sensor has been widely used in the adaptive optics system. It can be calibrated with a high-quality reference light in advance, but no reference light is needed for on-site measurement, so it is not as sensitive to the environment as the interferometer. , so it can be applied to quality control of optical components, beam quality measurement, human eye aberration, corneal surface measurement, etc. Existing Hartmann wavefront sensors usually use a microlens array to divide the beam aperture, and focus the incident light onto the photosensitive target surface of the photodetector (usually a CCD), or convert the focal plane of the microlens to The spot image ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B26/06G02B27/44G01J9/00
Inventor 王海英张雨东
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI