Method for forming microlens array structure
A technology of microlens array and surface shape, which is applied to the photoplate process of lens and pattern surface, optics, etc., can solve the problems of complex process, low production efficiency, high cost, etc., and achieve simple production process and reduced data volume Effect
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[0031] The present invention will be described in detail below in conjunction with specific embodiments and accompanying drawings, but the scope of protection of the present invention is not limited to the following examples, and should include all content in the claims.
[0032] The process of the method forming microlens array structure of the present invention is as follows:
[0033] (1) Choose germanium Ge material as the substrate, and coat the photoresist AZ9260 on its surface, the speed of the glue-spinning machine is 5000 rpm / s, the glue-spinning time is 30s, the pre-baking temperature is 65°C, and the pre-baking time is 25min, As shown in Figure 1;
[0034] (2) For a lens with an aperture of 1.5 mm, an ISI 1802 laser direct writing system is used to make a mask, and the system parameters are: d=0.1 μm, L=1 μm. Use the aforementioned formula (1) to calculate and determine the optimal sampling interval, and obtain D=13.28 μm. In order to make the sampling number an int...
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