Two-dimensional transversal zeeman double-frequency laser linearity/coaxiality measuring device

Abstract

The invention discloses a device for measuring linearity / coaxiality of a two-dimensional transverse dual-frequency Zeeman laser, which comprises a dual-frequency laser source; a telescope, a light splitter, a parallel light splitter, a first two-dimensional Wollaston prism, a second two-dimensional Wollaston prism and a two-dimensional rectangular prism, which are arranged in order on a light path axial line at an emission end of the laser; a second analyzer, a second photoelectric receiver, a third analyzer and a third photoelectric receiver, which are all arranged between the light splitter and the first two-dimensional Wollaston prism; a first analyzer and a first photoelectric receiver both arranged on the reflection light path of the light splitter; and a two-way signal processing unit and a display unit both connected with the three photoelectric receivers. The invention employs the two-dimensional optical elements to replace the conventional one-dimensional optical elements, so as to realize the simultaneous operation of installation, regulation and measurement of the linearity device in horizontal and vertical directions. Therefore, the invention shortens the measurement time, increases the accuracy of installation, and can accurately evaluate the error in linearity / coaxiality of an object to be measured.

Description

technical field [0001] The invention relates to laser precision measurement technology, in particular to a high-precision alignment measurement technology using laser. Background technique [0002] The measurement of straightness is one of the most basic measurement items in the field of geometric metrology. Long-distance straightness measurement is used in the installation and alignment of guide rails, the installation and positioning of large instruments, the manufacturing and testing of precision instruments, large-scale measurement, and military product manufacturing. Has a wide range of applications. In many projects, it is required to measure the coaxiality of multiple sets of shafts and holes, and it is required that the measurement can be carried out intermittently. Compared with the straightness, the coaxiality measurement puts forward higher requirements. [0003] Yin Chunyong of Tsinghua University and others proposed a method of measuring straightness / coaxiality...

AI Technical Summary

Problems solved by technology

Step 8 of this method requires that the right-angle prism 109, the Wollaston prism 107 or 108 and the movable sleeve 106 are all manually rotated by 90 degrees, which means that the straightness in the horizontal direction and the straightness / coaxiality in the vertical direction cannot be measured at the same time. Two measurements are required, which is time-consuming, and the starting positions of the two measurement settings will be slightly different, so the measured horizontal and vertical straightness / coaxiality do not correspond to the same series of positions

In this way, when the straightness / coaxiality of the two directions is combined to evaluate its comprehensive straightness / coaxiality, there is an error

Second, there are errors in manual rotation, and the consistency of angular rotation cannot be guaranteed, which will introduce new measurement errors due to the unsatisfactory installation position

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