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Apparatus for calibrating reflector and method

A device, a technique of calibrating data, applied in the direction of applications, roads, buildings, etc., which can solve the problem of being in a position different from its initial position (drift, etc.)

Inactive Publication Date: 2008-07-09
SAMSUNG ELECTRO MECHANICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In this case, although the upper micromirror layer must remain at the initial position after excitation, the upper micromirror layer may be located at a position different from its initial position due to the environment and the passage of time (drift)

Method used

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  • Apparatus for calibrating reflector and method
  • Apparatus for calibrating reflector and method
  • Apparatus for calibrating reflector and method

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Embodiment Construction

[0042] Reference will now be made to the drawings, wherein the same reference numerals are used throughout the different drawings to indicate the same or similar parts.

[0043] An apparatus for measuring the position of a mirror of a diffractive light modulator and a method of controlling the apparatus are described in detail with reference to FIGS. 4A to 13 .

[0044] FIG. 4A is a perspective view illustrating a concave-type diffractive light modulator to which the present invention is applied and utilizing a piezoelectric material.

[0045] Referring to FIG. 4A, a thin film piezoelectric optical modulator includes a silicon substrate 40 and a plurality of elements 42a-42n.

[0046] The elements 42a to 42n may have a uniform width and be regularly arranged and constitute a recessed thin film piezoelectric light modulator. Alternatively, the elements 42a to 42n may have different widths and be alternately arranged to constitute a recessed thin film piezoelectric light modulato...

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Abstract

For measuring the position of the mirror of the diffractive optical modulator and performing compensation or calibration apparatus, comprising: a light source for generating light and emitting light; diffracted light modulator for when the drive signal is input from the light source by modulating incident light generating diffracted light; drive means for driving signal is output to the diffractive optical modulator; light amount detecting means for measuring the amount of diffracted light emitted from the diffractive optical modulator; and a correction data calculation means for, when tester is calculated based on the pixel-based correction data is set to the reference voltage range of the amount of the diffracted light outputted from the light quantity detecting means, the diffracted light amount obtained by the light amount detecting means.

Description

[0001] This patent application is a divisional application of the patent application submitted to the China Patent Office on June 9, 2006 with the application number 200610087116.9 and the title of the invention "equipment and method for calibrating mirrors". technical field [0002] The present invention relates generally to an apparatus for measuring the position of a mirror of a diffractive light modulator and performing position compensation and a method of controlling the apparatus, and more particularly, to an apparatus for measuring the mirror position of a diffractive light modulator. An apparatus for measuring the position of a diffractive light modulator and performing position compensation by measuring capacitance of the mirror, capacitance of a piezoelectric material layer, or intensity of output diffracted light and performing position compensation, and a method of controlling the apparatus . Background technique [0003] With the development of microtechnology,...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B26/08
CPCE01C13/02E02B11/00E02D31/025E02D2450/102
Inventor 尹相璟安承道
Owner SAMSUNG ELECTRO MECHANICS CO LTD