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Non-contact electricity feeding system and running vehicle using this

A power supply system, non-contact technology, applied in electromagnetic wave systems, electric vehicles, devices along the driving track, etc., can solve the problems affecting laser and semiconductor inspection, affecting electronic equipment, etc., to reduce the impact and weaken the leakage magnetic field effect.

Inactive Publication Date: 2008-07-16
MURATA MASCH LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Magnetic fields affect not only inspection of lasers and semiconductors, but also electronics within processing units

Method used

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  • Non-contact electricity feeding system and running vehicle using this
  • Non-contact electricity feeding system and running vehicle using this
  • Non-contact electricity feeding system and running vehicle using this

Examples

Experimental program
Comparison scheme
Effect test

Embodiment

[0019] 1 to 5 show examples. In each figure, 2 is a running track, and a pair of left and right power supply rails 4, 4' are arranged on the lower part thereof, and a pair of power supply lines 5, 5 are arranged on the power supply rail 4, for example. In addition, the power supply rail 4 ′ may use a turning section or the like, or physically make the power supply rails 4 and 4 ′ a part of the running rail 2 . From an AC power source not shown in the figure, an AC of about 10 KHz flows through the power supply line 5, and the magnetic field generated by the power receiving coil of the overhead traveling vehicle not shown in the figure receives power to perform non-contact power supply. The electromagnet core is, for example, a member in which a coil is wound around a magnetic core.

[0020] 6 is a pillar, and the traveling track 2 and the power supply rails 4, 4' are arranged in the clean room, and the bridge type traveling vehicle transports such as semiconductor boxes or re...

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PUM

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Abstract

The invention provides a non-contact power supply system and a traveling vehicle system using the system. The pick-up coil receives the magnetic field of the power supply line (5) for non-contact power supply, and a compensating current with the same phase as or opposite to the current in the power supply line (5) flows in the external antenna (8). The magnetic field generated by the compensating current is used to cancel the magnetic field from the power supply line (5), and the influence on the processing device (10) is weakened. Weaken the leakage magnetic field from the non-contact power supply system and prevent the influence on surrounding processing devices.

Description

technical field [0001] The present invention relates to the reduction of magnetic field leakage from a non-contact power supply system used as part of, for example, a bridge trolley system or a trolley system. Background technique [0002] Non-contact power supply is used in traveling vehicle systems such as overhead traveling vehicle systems. In this system, the power supply line is laid on the traveling track of the bridge-type traveling vehicle, and the bridge-type traveling vehicle uses the pick-up coil arranged on the magnetic core to receive electricity without contact. A loading port is provided under the running track, and semiconductor boxes, etc. are handed over between the overhead traveling vehicle. The loading port is attached to the processing device, and the transported semiconductor wafers, etc. are inspected, exposed to light, and injected with impurities in the processing device. , etching and other treatments. [0003] The inventors have found that with ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H02J17/00B60L5/00B60M7/00
CPCB60L5/005B60L2200/26H01F27/346H01F38/14B60M7/00H02J50/12H02J50/70
Inventor 幸本誉
Owner MURATA MASCH LTD
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