Method for manufacturing color filter, color filter and liquid crystal display
A manufacturing method and a color filter technology, which are applied in the direction of photoplate-making process exposure device, optical filter, patterned surface photoplate-making process, etc., can solve the problems of lens image plane curvature, aberration, and exposure performance reduction, etc.
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no. 1 approach -
[0536] As shown in Figure 13, the light reflection side of DMD36 is provided with projection optics system, and this projection optics system is owing to light source image is projected on the photosensitive layer 12 that is positioned at the exposure face of the light reflection side of DMD36, therefore, from DMD36 side direction In the photosensitive layer 12, each exposure optical member of the lens system 26, the microlens array 128, and the objective lens system 130 is arrange|positioned in this order.
[0537] Described lens system 126 and described objective lens system 130 are constituted as the magnification optical system of combination multi-lens lens 9 convex lens or concave lens 0, by enlarging the cross-sectional area of the laser beam (beam of light) reflected by DMD36, will be based on the laser beam reflected by DMD36 The area of the exposed region on the photosensitive layer 12 of the beam is enlarged to a predetermined size. In addition, the photosensiti...
no. 2 approach -
[0550] In the second embodiment, in the exposure head 30 of the exposure apparatus in the above-mentioned first embodiment, a telecentric optical system having an aspherical lens is provided in the condenser lens system 114, thereby, similarly to the first embodiment, A technique for uniformizing the light intensity distribution of the light beam on the exposure surface.
[0551] In the exposure head in the second embodiment, for example, in the condensing pension 114, a telecentric optical system 150 composed of two plano-convex lenses 152, 154 as a set, as shown in FIG. 16A, is provided. The telecentric optical system 150 is arranged, for example, between the rod integrator 118 and the condenser lens 120 .
[0552] The plano-convex lenses 152 and 154 are aspheric lenses whose convex sides are aspherical. In the plano-convex lens 152 arranged on the incident side of the laser light (fiber array light source 38 side), the surface shape of the incident surface S2 is an aspheri...
Embodiment 1
[0872]
[0873] (1) Formation of black (K) image
[0874] After cleaning the non-alkali glass substrate with a UV cleaning device, use a cleaning agent to perform brush cleaning, and then perform ultrasonic cleaning with ultrapure water. This substrate was heat-treated at 120° C. for 3 minutes to stabilize the surface state.
[0875] After cooling the substrate and adjusting it to 23° C., the glass substrate coating machine (manufactured by FAS Japan Co., Ltd., trade name: MH-1600) equipped with a slit-shaped nozzle was used to coat the following glass substrate with the composition described in Table 3 below. Coloring photosensitive composition K1. Next, a part of the solvent was dried with a VCD (vacuum drying device, manufactured by Tokyo Ohka Industry Co., Ltd.) for 30 seconds to eliminate the fluidity of the coating layer, and then prebaked at 120° C. for 30 minutes to obtain a 1.5 μm-thick film. Photosensitive layer K1.
[0876] -Preparation of photosensitive compos...
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Abstract
Description
Claims
Application Information
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