SiC synthesis stove gas collection system and gas collection method
A technology of collection system and synthesis furnace, which is applied in the field of gas collection system and gas collection, and can solve problems such as difficulties in the installation of collection devices
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[0052] like figure 1 As shown, a SiC synthesis furnace gas collection system, the gas collection system includes a collection device 12 placed on the SiC synthesis furnace for gas collection, a clutch walking mechanism 1 connected to the collection device 12, arranged on the collection device The detection and analysis device and equalizing pressure relief device on 12 are arranged around the furnace body 3 of the SiC synthesis furnace and are in contact with the collection device 12 to form a sealed connection device that forms a closed space.
[0053] Collection device 12: including collection case 2 and sealing skirt 18, rails 16 are installed on both sides of the SiC synthesis furnace, wheels 15 are installed on the lower ends of both sides of the collection case 2, so that the collection case 2 reciprocates on the rails 16, and the collection case 2. A sealing skirt 18 is arranged at the lower end, and the sealing skirt 18 is closely connected with the collecting case 2. ...
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