A method for making horizontal dual pervasion field effect transistor
A field-effect transistor, lateral double diffusion technology, applied in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., can solve problems such as increasing costs, and achieve the effect of expanding capacity and reducing costs
Active Publication Date: 2010-06-23
SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORP +1
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However, these methods need to introduce some special steps, such as the introduction of doping, masks and other methods, which still increase the cost
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[0023] The present invention will be described in further detail below in conjunction with the specific implementation manner of accompanying drawing and N-type LDMOS device:
[0024] figure 1 Three LDMOS structures fabricated using this method are shown. The main difference between LDMOS and conventional MOS field effect transistors is that there is a low-doped drift region ( figure 1 (a)). The drift region of LDMOS can be further optimized by introducing doped implanted regions or insulating impurity regions, see figure 1 (b) and figure 1 (c). and figure 1 The LDMOS structure shown in can be realized by using only standard CMOS technology through the method of layout design.
[0025] figure 2 given in the preparation figure 1 (c) Schematic layout design of the shown structure. In the figure: the layout of the N well is used in the layout to form the low-doped drift region of the N-type LDMOS, the layout of the P well forms the body region, and the body lead-out reg...
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The invention discloses a method for manufacturing a laterally dual-diffused FET (field effect transistor), belonging to FET manufacturing field, the method is achieved by using the method for manufacturing LDMOS according to standard CMOS manufacturing processes, to realize LDMOS via chart design as following: defining a active layout to form a body extracting area, a source area, a drain area, a channel area, a drift area and a grid area of a LDMOS element; the source area, grid area and drain area are formed according to a re-doping injection layout; the drift area is disposed between the drain area and the channel area; both of the body extracting area and the source area are in grounding connection; using a N well layout to form a low-doping drift area of a N type LDMOS, or using P well layout to form a P type low-doping drift are of a P type LDMOS; using anti-silicification board to prevent the drift area from being silicified; the design of the source area, the drain area and the grid area complies with the normal MOS. The invention can be applied on any standard process, effectively reducing costs, and improving the capability of standard process for manufacturing special elements.
Description
technical field [0001] The invention relates to a preparation method of a field effect transistor, in particular to a preparation method of a lateral double-diffusion field effect transistor. Background technique [0002] A lateral double-diffused MOS transistor (lateral double-diffused MOS transistor, LDMOS) is a lightly doped drain MOS device. Compared with ordinary MOS devices, LDMOS has a longer lightly doped implantation region at the drain end, usually the doping concentration of this part of the structure is 10 16 cm -3 magnitude, known as the drift region. The LDMOS structure withstands a higher voltage drop through the drift region. Because LDMOS technology is simple, reliable, mature, and has good RF performance, and because the manufacturing process of LDMOS transistors is fully compatible with existing standard CMOS processes, it is easier to achieve large-scale integration with low-voltage CMOS circuits and reduce manufacturing cost. It is mainly used in va...
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IPC IPC(8): H01L21/336
Inventor 张丽杰黄如肖韩王鹏飞杨淮洲
Owner SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORP