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Methods and apparatus for configuring plasma cluster tools

A cluster tool and configuration file technology, applied in the field of secure general configuration software for cluster tools, can solve the problems of affecting users, user burden, time-consuming and expensive custom coding, etc.

Active Publication Date: 2008-10-08
LAM RES CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, custom coding is time consuming and expensive
Delays and costs associated with custom coding impact users not only at the initial purchase stage, but every update cycle when the cluster tool is updated with new subsystems and / or components
Over time, the need to maintain different versions of the cluster tool's configuration software program is a burden on both the manufacturer of the cluster tool and the user

Method used

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  • Methods and apparatus for configuring plasma cluster tools
  • Methods and apparatus for configuring plasma cluster tools
  • Methods and apparatus for configuring plasma cluster tools

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Embodiment Construction

[0033] The invention will now be described in detail with reference to some of its embodiments shown in the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. It will be apparent, however, to one skilled in the art that the present invention may be practiced without some or all of these specific details. In other instances, well-known processes and / or structures have not been described in detail to avoid unnecessarily obscuring the present invention.

[0034]Various embodiments are described below, including methods and techniques. It should be kept in mind that the present invention may also cover articles of manufacture comprising a computer-readable medium having stored thereon computer-readable instructions for carrying out embodiments of the inventive technique. For example, a computer readable medium may include semiconductor, magnetic, optomagnetic, optical...

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Abstract

A method for configuring a plasma cluster tool is disclosed. The method includes generating a key file from option specifications, the key file encapsulating configuration restrictions specifically imposed on the plasma cluster tool. The method also includes generating at least one system-wide configuration file and at least one component-level configuration file using the key file. The method additionally includes generating run-time executable objects from a database of option definition files, the at least one system-wide configuration file and the at least one component-level configuration file. Furthermore, the method includes employing the run-time executable objects to configure the plasma cluster tool.

Description

Background technique [0001] Plasma processing tools have long been used to process wafers and other small devices (eg, flat panels, nanomachines, etc.). Cluster tools, representing variants of plasma processing tools, have been widely used. In a cluster tool, multiple process chambers are clustered around one or more transfer modules. Each process chamber is configurable for one or more specific processes. By moving a semiconductor substrate from a processing chamber to a processing chamber of a cluster tool, a fabricator can subject a substrate to multiple processes and multiple processing recipes in a relatively short period of time. One of the benefits of using cluster tools in a manufacturing environment is increased throughput. [0002] For ease of discussion, Figure 1 shows a cluster tool 100, which represents a high-level, simplified logical representation of a typical cluster tool. Cluster tool 100 includes a front end 102 and a back end 104 . The front end 102 ca...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G06F19/00G06F9/24G06F9/445G06F15/177
Inventor 黄忠河范石全张震川
Owner LAM RES CORP
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