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Adsorption workbench

A workbench, vacuum suction technology, applied in the direction of measuring devices, instruments, measuring electricity, etc., can solve problems such as image disorder, and achieve the effect of preventing vibration

Inactive Publication Date: 2008-11-26
NIDEC-READ CORPORATION
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, due to this deviation, the image obtained by imaging is disturbed, or the situation that the plate-shaped member cannot be stably contacted with the jig that can be electrically connected occurs.

Method used

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Embodiment Construction

[0030] Next, the adsorption workbench according to the present invention will be described in detail with reference to the accompanying drawings. In the drawings, the same reference numerals are assigned to the same elements, and repeated description thereof will be omitted.

[0031] In addition, in the following description of the adsorption stage, the case where it is installed in the optical inspection apparatus 10 will be described, but it is not particularly limited thereto, and it can also be used as an adsorption stage of other processing apparatuses.

[0032] [Overview of Adsorption Workbench]

[0033] Adsorption workbench 22, for example as described later Figure 4As shown, for example, it can be installed in the inspection substrate holding device 20 of the optical inspection apparatus 10 for substrate inspection, and the inspection substrate 28 can be placed on the suction table 22 . In the embodiment shown in the figure, the inspection substrate is inspected, bu...

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PUM

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Abstract

The invention provides an adsorption table and provides a vibration adsorbing device, for adsorbing a plurality of vibrations with a plurality of frequencies, and preventing the vibrations from transmitting to tabular parts of inspected substrates and the like. The vibration adsorbing device is a tabular device, connected with a vacuum suction unit, and applied in the adsorption table keeping as carried parts of carried objects. The vibration adsorbing device is used for carrying the carried parts on one side, while is connected with the vacuum suction unit on the other side, wherein the vibration adsorbing device is provided with air ducts, for communicating connecting parts between the vacuum suction units and one side of the vibration adsorbing device. The air ducts are composed of a plurality of small holes formed by wall surfaces with different sizes, wherein the wall surfaces are composed of metal fragments connected by point contact. The vibration adsorbing device adsorbs the vibrations caused by the vacuum suction unit, thereby preventing the vibrations from transmitting to the carried parts.

Description

technical field [0001] The present invention relates to a suction table, and more particularly to a vibration absorbing device used in a suction table for holding a plate-shaped member such as a substrate by suction. [0002] In addition, the substrate is not limited to printed wiring boards, and it is a general term for various substrates: for example, flexible substrates, multilayer wiring substrates, electrode plates for liquid crystal displays or plasma displays, and packaging substrates for semiconductor packaging, or Film carriers, semiconductor wafers, or sheet-like parts to be inspected. Background technique [0003] When a circuit pattern is formed on a printed wiring board, defects such as a short circuit or an open circuit may occur in the circuit pattern. In order to find such substrate defects, for example, an optical inspection device is used. Such an optical inspection device has: a stage for holding an inspection substrate; a light irradiation device that o...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R1/02G01R31/02
Inventor 北泽一孝西体良太
Owner NIDEC-READ CORPORATION
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