Micro/nano scale ultra-micro force measuring device and force value tracing method

A technology of measuring device and force value, which is applied in the direction of measuring device, force/torque/work measuring instrument, force/torque/work measuring instrument calibration/testing, etc., which can solve the problems of micro force sensor performance measurement lag and so on

Inactive Publication Date: 2008-12-10
TIANJIN UNIV
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Problems solved by technology

However, the performance measurement of the micro force sensor itself appears to be relatively lagging

Method used

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  • Micro/nano scale ultra-micro force measuring device and force value tracing method
  • Micro/nano scale ultra-micro force measuring device and force value tracing method
  • Micro/nano scale ultra-micro force measuring device and force value tracing method

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Embodiment Construction

[0018] In the International System of Units (SI), force is a derived quantity based on Newton's second law (F=ma), and the unit name is Newton (ton) (N). When taking [m]=kg (kilograms), [a]=m / s 2 (m / s 2 ), the unit of force is:

[0019] [F]=1kg·m / s 2 =N(Newton[ton])

[0020] Since the gravitational acceleration g in a certain area is constant, the self-gravity of the standard weight can be used as the reference force.

[0021] Force exists widely in nature, and it is more convenient to reproduce the value of force through physical methods. It is a typical method to use the basic physical quantities in the International System of Units to derive other physical quantities. The lowest uncertainties are obtained when the measurands in these physical methods use the fundamental physical quantities in the SI unit.

[0022] The electrical reappearance method of the force value can use electromagnetic force or electrostatic force. Generally, the force on a current-carrying condu...

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Abstract

The invention belongs to the technical fields of metering and measuring an ultramicro force value and relates to a measuring device for an ultramicro force value of micro-Newton/nano-Newton grade which includes a lever; one end of the lever is a bearing disk and a spring is hung at the other end; the other end of the spring is fixedly provided with an inner electrode; the upper part of the inner electrode is provided with a mechanism which limits the inner electrode to move outside the moving freedom of z-axis; the lower part of the inner electrode is a cylinder; an outer electrode is sheathed on the outer surface at the lower part of the inner electrode; the outer electrode is a cylinder which is coaxial with the cylinder at the lower part of the inner electrode; the inner diameter of the outer electrode is larger than the outer diameter of the cylinder at the lower part of the inner electrode; the other end of the outer electrode is provided with a laser interferometer used for measuring the displacement of the inner electrode. The invention simultaneously provides an ultramicro force value tracing method. The precision of the measuring device provided by the invention can meet the demand of the highest standard of the force value; the measuring device can be used for calibrating a probe force measuring sensor, a surface tension sensor and an ultramicro force detector in the manufacture technologies like a micro-electromechanical system, a biochip, etc.

Description

technical field [0001] The invention belongs to the technical field of ultra-small force value measurement and measurement. Background technique [0002] With the development of modern science and technology, research on the mechanical properties of micro-scale components in micro-electromechanical systems (MEMS), observation of micro-friction phenomena, micro-force monitoring in micro-sensing micro-robot micro-assembly, liquid surface tension analysis, film, fiber mechanical properties Research, biochip and biological microtissue force measurement, etc., require the measurement of tiny force values ​​in large numbers. Therefore, the research, production and production of micro force sensors are flourishing. However, the performance measurement of the micro force sensor itself appears to be relatively lagging. Therefore, an easy-to-use and traceable ultra-micro force value measuring and testing instrument is developed to provide 10 -5 The basic force value standard below ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N13/00G01N13/16G01L5/00G01L25/00G01Q40/00
Inventor 齐永岳林玉池赵美蓉付鲁华黄银国宋乐
Owner TIANJIN UNIV
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