Micro/nano scale ultra-micro force measuring device and force value tracing method

Abstract

The invention belongs to the technical fields of metering and measuring an ultramicro force value and relates to a measuring device for an ultramicro force value of micro-Newton / nano-Newton grade which includes a lever; one end of the lever is a bearing disk and a spring is hung at the other end; the other end of the spring is fixedly provided with an inner electrode; the upper part of the inner electrode is provided with a mechanism which limits the inner electrode to move outside the moving freedom of z-axis; the lower part of the inner electrode is a cylinder; an outer electrode is sheathed on the outer surface at the lower part of the inner electrode; the outer electrode is a cylinder which is coaxial with the cylinder at the lower part of the inner electrode; the inner diameter of the outer electrode is larger than the outer diameter of the cylinder at the lower part of the inner electrode; the other end of the outer electrode is provided with a laser interferometer used for measuring the displacement of the inner electrode. The invention simultaneously provides an ultramicro force value tracing method. The precision of the measuring device provided by the invention can meet the demand of the highest standard of the force value; the measuring device can be used for calibrating a probe force measuring sensor, a surface tension sensor and an ultramicro force detector in the manufacture technologies like a micro-electromechanical system, a biochip, etc.

Description

technical field

[0001] The invention belongs to the technical field of ultra-small force value measurement and measurement. Background technique

[0002] With the development of modern science and technology, research on the mechanical properties of micro-scale components in micro-electromechanical systems (MEMS), observation of micro-friction phenomena, micro-force monitoring in micro-sensing micro-robot micro-assembly, liquid surface tension analysis, film, fiber mechanical properties Research, biochip and biological microtissue force measurement, etc., require the measurement of tiny force values ​​in large numbers. Therefore, the research, production and production of micro force sensors are flourishing. However, the performance measurement of the micro force sensor itself appears to be relatively lagging. Therefore, an easy-to-use and traceable ultra-micro force value measuring and testing instrument is developed to provide 10 -5 The basic force value standard below ...

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