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Thin-film composite and a glass ceramic substrate used in a miniaturised electrochemical device

A technology of glass ceramics and oxide ceramics, which is applied in the direction of electrochemical generators, fuel cell components, circuits, etc., and can solve the problems of not meeting the requirements of thin films and insufficient life

Inactive Publication Date: 2008-12-17
EIDGEN SSISCHE TECH HOCHSCHULE Z RICH (ETH)
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

[0004] Existing substrates do not meet the requirements for such films with multiple layers and correspondingly complex mechanical structural features (crack formation, insufficient lifetime)

Method used

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  • Thin-film composite and a glass ceramic substrate used in a miniaturised electrochemical device
  • Thin-film composite and a glass ceramic substrate used in a miniaturised electrochemical device
  • Thin-film composite and a glass ceramic substrate used in a miniaturised electrochemical device

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Embodiment Construction

[0058] Figure 1 shows a film 10 with a layered structure consisting of three layers, the first layer S 1 , the second layer S 2 and third layer S 3 . Here, the first layer S 1 is a cermet layer with a metal ratio of 40% and a ceramic ratio of 60%, which has Ni-Ce 0.8 Gd 0.2 o 1.9 Specifications (Spezifikation). The second layer S 2 For the reduced oxygen ion O 2- is conducting, with Ce 0.6 Gd 0.2 o 1.9 Specifications. The third layer S 3 , with La 0.6 Sr 0.4 co 0.2 Fe 0.8 o 3 Specifications. The thickness of layers S1, S2, S3 is called d L .

[0059] FIG. 2 shows a film 10 according to FIG. 1 consisting of a layered film composition, which is arranged on a substrate 12 and constitutes a composite element 13 serving as a functional element. Substrate 12 provides film 10 with the necessary mechanical strength. According to a preferred embodiment, layers S1 , S2 , S3 are deposited sequentially according to an existing method, wherein the area width of each l...

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Abstract

The invention relates to a composite element (13) comprising a thin film (10) that consists of at least two layers (S1, S2, S3) of an oxide-ceramic and metallic material, or a metallic material and an essentially flat substrate (12) that supports the thin film (10). Said substrate is composed of a ceramicizable glass, a glass ceramic, a hybrid form or an intermediate product. To produce the substrate, selected regions are dissolved out of the photostructurable glass substrate (12). The composite element (13) can be successfully used in a miniaturised electrochemical device, in particular in a solid oxide fuel cell SOFC (18), a sensor (36) or as a gas separation membrane (17).

Description

technical field [0001] The invention relates to a composite element (Verbundelement) comprising a thin film and a substantially planar substrate (Substrat) supporting the thin film, wherein the thin film is composed of an oxide ceramic material, an oxide ceramic and a metallic material, or at least a metallic material Consists of two different layers. The invention furthermore relates to a method for building up a substrate and the use of such a composite element with a film. Background technique [0002] Thin films, especially conductive films made of ceramic and / or metallic materials, have attracted increasing attention. Typically the film consists of multiple layers, especially three to five layers, wherein the materials and / or morphology of each layer are generally different. The thin films are generally deposited on the substrate in layers, wherein common thin film techniques can be applied, for example by chemical vapor deposition, pulsed laser vapor deposition, sol-...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01M8/12H01M4/86
CPCH01M4/8621H01M4/8642H01M4/9016H01M8/1213H01M8/1286Y02E60/50H01M8/02
Inventor L·J·高克勒D·贝克尔U·穆克P·米勒J·鲁普
Owner EIDGEN SSISCHE TECH HOCHSCHULE Z RICH (ETH)
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